Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores proximity effect corrections in electron beam lithography for small and large features, emphasizing the importance of beam point spread function modeling.
