Publications related to Metal fabrication

Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

We introduce a detailed design and fabrication process of Silicon microcantilever arrays for biomolecular detection in liquid environment, utilized with laser readout. We present typical fabrication problems and provide related solutions to obtain high qua ...

Elsevier2024

Additively manufactured stretchable zipping electrostatic actuators

Giulio Grasso

The use of soft and stretchable materials allows the development of adaptive robotic systems and human-machine interfaces that are more natural and comfortable to interact with. One of the application fields that benefits the most from these compliant mate ...

EPFL2024

Evaluation of Interface and Residual Strain of NiTi Layer Deposited on NiTiX Substrate by Laser Powder Bed Fusion

Christian Leinenbach, Elyas Ghafoori, Irene Ferretto, Mahbod Golrang, Mahshid Memarian

This study investigates the microstructure and properties of functionally graded NiTi alloy bilayers. The NiTi layer is printed by laser powder bed fusion on a NiTiX (where X is Hf or Cu) substrate prepared by vacuum arc remelting. Specimens produced with ...

Wiley-V C H Verlag Gmbh2024

Carbon based printed electrodes for DEAs: study of pad, inkjet, and stencil printing

Yves Perriard, Yoan René Cyrille Civet, Thomas Guillaume Martinez, Stefania Maria Aliki Konstantinidi, Armando Matthieu Walter, Simon Holzer

Dielectric elastomer actuators (DEAs) have raised interest due to their remarkable capabilities in various applications, such as soft robotics, haptic feedback systems, and biomedical devices. To harness the full potential of DEAs, the choice of the electr ...

Society of Photo-Optical Instrumentation Engineers (SPIE)2024

Laser powder bed fusion of Fe-based shape memory alloys for novel structural metamaterials and "smart" structures

Irene Ferretto

Laser powder bed fusion (LPBF) is a powder-based additive manufacturing (AM) technique, which shows great potential in the production of complex-shaped parts with unprecedented design freedom. In addition, it allows for an active manipulation of the micros ...

EPFL2023

Zinc hybrid sintering for printed transient sensors and wireless electronics

Danick Briand, Nicolas Francis Fumeaux

Transient electronics offer a promising solution for reducing electronic waste and for use in implantable bioelectronics, yet their fabrication remains challenging. We report on a scalable method that synergistically combines chemical and photonic mechanis ...

2023

Reinforcement learning for scaffold-free construction of spanning-structures

Maryam Kamgarpour, Stefana Parascho, Gabriel Rémi Vallat, Anna Maria Maddux, Jingwen Wang

In construction robotics, a conventional design-to-fabrication work-flow starts with designing a structure, followed by task and robotic motion planning, and ultimately, fabrication. However, this approach can prove unsuccessful, as we may only discover th ...

New York2023

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

A Variable Stiffness Magnetic Catheter Made of a Conductive Phase-Change Polymer for Minimally Invasive Surgery

Dario Floreano, Yegor Piskarev, Jun Shintake

Variable stiffness (VS) is an important feature that significantly enhances the dexterity of magnetic catheters used in minimally invasive surgeries. Existing magnetic catheters with VS consist of sensors, heaters, and tubular structures filled with low me ...

2022

Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography

Henry Shao-Chi Yu

The fabrication of metallic nanostructures on stretchable substrates enables specific applications that exploit the combination of the nano-scale phenomena and the mechanical tunability of the physical dimensions of the nanostructures. Due to the large dif ...

EPFL2022

Extended-gate field-effect transistor with aptamer functionalisation layer for measuring hormone concentration in biofluids and corresponding fabrication method

Mihai Adrian Ionescu, Shokoofeh Sheibani

The present invention concerns a biosensor (1) for sensing stress hormone cortisol concentration in a biofluid (27). The biosensor (1) comprises: an electrical transistor transducer (3) comprising a transistor gate electrode (17); a sensing electrode eleme ...

2022

Self-Assembled Dewetting as a Fabrication Platform for Photonics Applications

Fabien Sorin, Pierre-Luc Eloi Piveteau, William Nicolas Duncan Esposito, Louis Marie Philippe Martin-Monier, Bastien Schyrr

A novel fabrication method based on controlled fluid re-arrangement of thin amorphous optical glass film is leveraged to realize two large-area photonics metasurfaces: 1) a highly directional nanoantenna array (metareflector), and 2) a metagrating for inde ...

IEEE2022

Controlling surface effects in extremely high aspect ratio gold plasmonic electrodes

Olivier Martin, Christian Santschi, Marco Riccardi

Nanofabrication is key to many technological advances, especially the challenge of merging nanophotonics with electronics. Here, we investigate the fabrication process of plasmonic interdigitated gold electrodes having a very high aspect ratio (i.e. long a ...

ELSEVIER2022

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Herbert Shea, Samuel Rosset, Giulio Grasso

Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Fabrication of Single-Crystalline InSb-on-Insulator by Rapid Melt Growth

Anna Fontcuberta i Morral, Nicholas Paul Morgan, Heera Menon

InSb has the smallest bandgap and highest electron mobility among III-V semiconductors and is widely used for photodetectors and high-frequency electronic applications. Integration of InSb directly on Si would drastically reduce the fabrication cost and en ...

Wiley2021

An integrated design tool for timber plate structures to generate joints geometry, fabrication toolpath, and robot trajectories

Yves Weinand, Nicolas Henry Pierre Louis Rogeau, Pierre Latteur

This paper presents an integrated design tool for structures composed of engineered timber panels that are connected by traditional wood joints. Recent advances in computational architecture have permitted to automate the fabrication and assembly of such s ...

2021

The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

Edoardo Charbon, Sandro Carrara, Simone Frasca, Rebecca Camilla Leghziel

We present here, for the first time, a fabrication technique that allows manufacturing scallop free, non-tapered, high aspect ratio in through-silicon vias (TSVs) on silicon wafers. TSVs are among major technology players in modern high-volume manufacturin ...

Nature Research2021

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Henning Paul-Julius Stahlberg

Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization ...

2020

Fabrication of Sub-10-nm Plasmonic Gaps for Ultra-Sensitive Raman Spectroscopy

Hatice Altug, Arif Engin Cetin

The past two decades have witnessed the explosion of activities in the field of surface enhanced Raman spectroscopy (SERS). SERS platforms employ nano-structures that excite plasmonic modes with large local electromagnetic fields localized within small gap ...

SPRINGER2020

Flexure-based mecano-optical multi-degree-of-freedom transducers dedicated to medical force sensing instruments

Sebastian Krzysztof Fifanski

This thesis develops novel multi-degrees-of-freedom flexure-based force sensors by exploiting white light interferometry. Fabry-Pérot interferometry measurement has nanometric accuracy which yields sub milli-Newton force sensing accuracy. Such force sensin ...

EPFL2020