ME-436: Micro/Nano roboticsThe objective of this course is to expose students to the fundamentals of robotics at small scale. This includes a focus on physical laws that predominate at the nano and microscale, technologies for
MICRO-470: Scaling laws in micro & nanosystemsThis class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation
MICRO-606: Scaling in MEMSThis doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.
