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Related publications (25)

Effect of Native Oxide on Stress in Silicon Nanowires: Implications for Nanoelectromechanical Systems

Yusuf Leblebici, Zuhal Tasdemir, Mohammad Nasr Esfahani

Understanding the origins of intrinsic stress in Si nanowires (NWs) is crucial for their successful utilization as transducer building blocks in next-generation, miniaturized sensors based on nanoelectromechanical systems (NEMS). With their small size lead ...

AMER CHEMICAL SOC2022

Integrated Magnetic-free Nitride Optical Isolator

Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Junqiu Liu, Jijun He

We demonstrated an integrated magnetic-free optical isolator for Si3N4 photonics using AlN piezoelectric actuators via spatio-temporal modulation. By entering into the strong mode coupling regime, maximum of 9dB isolation and

IEEE2021

Design and Manufacturing of an Electrostatic MEMS Relay for High Power Applications

Yves Perriard, Yoan René Cyrille Civet, Christian Köchli, Florian Louis Copt

This paper addresses the design and manufacturing of a crab-leg based MEMS relay for a high power application. Thanks to a contact resistance lower than 100 mΩ, the relay can hold a current in the order of magnitude of an Ampere without further thermal lim ...

2021

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Göran Stemme

Silicon (Si) photonic micro-electro-mechanical systems (MEMS), with its low-power phase shifters and tunable couplers, is emerging as a promising technology for large-scale reconfigurable photonics with potential applications for example in photonic accele ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

Niels Quack, Hamed Sattari, Gergely Huszka, Anton Lagosh, Benedikt Guldimann

We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 mu m x 111 mu m smart slit channel employing a MEMS actuated shutter to continuously mod ...

SPIE-INT SOC OPTICAL ENGINEERING2021

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