Explores high pressure chemistry, novel process windows, batch to continuous transition, supercritical fluids, and industrializable technology criteria.
Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Explores the properties and applications of solvents, including polarity, density, viscosity, and solubility, as well as their role in heterogeneous mixtures and auto-ignition.