Extreme ultraviolet lithography

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Electrical engineering
Electromechanics
Microelectromechanical systems

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Related lectures (32)

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Covers the basics of nanoimprint lithography and its applications in high-end microelectronic chips.

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Nanofabrication: Techniques and Challenges

Explores nanofabrication techniques, challenges, and the use of silicon wafers.

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Explores advanced lithography techniques, simulation stages for circuit design, and the impact of clock variations on circuit performance.

Scanning Probe Lithography: Nanometer Scale Patterning Techniques

Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.

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Covers top-down methods in nanoscience, including lithography and nanoimprint lithography for fabricating nanostructures and organic solar cells.

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Showcases the practical steps of fabricating a mask for UV lithography.

Advancements in Extreme Ultraviolet Metaoptics

Covers the development of ultrathin metasurfaces for manipulating extreme ultraviolet light in advanced optical applications.

Thermal Scanning Probe Lithography

Explores Thermal Scanning Probe Lithography, Dip-Pen Nanolithography, surface wettability, data storage roadmap, and the Millipede concept.

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