Plasma etching

Applied sciences
Electrical engineering
Electromechanics
Microelectromechanical systems

About
Privacy
Disclaimer

Graph Chatbot

Related lectures (32)

Plasma Physics: Frequencies and Parameters

Explores the definition of plasma, Debye length, plasma frequency, and collision frequency in various scenarios.

Untitled

Light Propagation in Plasmas

Explores light propagation, resonant absorption, and collisionless absorption in plasmas.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Untitled

Wet Etching: Chemical Reactions and Process Optimization

Explores the chemical reactions and optimization of isotropic wet etching in Si.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Sputtering: Plasma Formation and Thin Film Deposition

Covers sputtering, plasma creation, and thin film deposition processes.

Plasma State: Properties and Effects

Covers the definition and properties of plasma, including ionization and collective effects.

Non-inertial Reference Frames and Constraints

Covers non-inertial reference frames, constraints, and continuous systems, including angular velocity, linear and rotational acceleration, and modeling of merry-go-rounds, ropes, and pulleys.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Page 2 of 2