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Related publications (24)

Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique

Jürgen Brugger, Edoardo Charbon, Vahid Fakhfouri, Dmitri Boiko, Joo Yeon Kim, Nils Benedict Brauer

Microlens arrays fabricated by a direct ink-jet printing of UV-curable hybrid polymer are reported. A periodic pattern of polymer drops was ink-jet printed on the surface-treated glass substrate and cured in the UV-light. Using this simple technique, we de ...

2011

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet

The reliable and reproducible fabrication of nanostructures by stencil lithography faces three main challenges: the stability of the thin stencil membranes with nanoapertures, the blurring of the deposited structures, and the clogging of the nanoapertures ...

2011

Robust PECVD SiC membrane made for stencil lithography

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie, Oscar Vazquez Mena, Katrin Sidler Arnet, Wei Tang

Stencil lithography (SL) is a shadow mask based technique which allows parallel, resistless, micro- and nano-patterning of material through apertures in a membrane (stencil) onto a substrate [1]. The stencils are usually made of LPCVD low-stress SiN due to ...

Microelectronic Engineering2011

Stencil Lithography and Inkjet Printing as New Tools for Life Sciences Research

Kristopher Pataky

This thesis work focuses on applying microtechnology to produce three toolkits for life-sciences research. The first technique presented is nanostencil lithography for patterning cell adhesions. Nanostencil lithography is a shadow-mask micro and nanopatter ...

EPFL2011

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