Concept

Interference lithography

Related publications (26)

Multimaterial Nanoporous Membranes Shaped through High Aspect-Ratio Sacrificial Silicon Nanostructures

Philippe Renaud, Arnaud Bertsch, Niccolo Piacentini, Stefano Silvio Giovanni Varricchio

We present an innovative fabrication method for solid-state nanoporous membranes based on the casting of sacrificial silicon nanostructures. The process allows the individual definition of geometry and placement of each nanopore through e-beam lithography ...

Amer Chemical Soc2017

Limitations of Proximity Lithography Printing : Simulations, Experiments, and Applications

Krishnaparvathy Puthankovilakam

Photolithography is one of the earliest technologies used to transfer patterns to a substrate. It is also known as optical lithography since it uses light to transfer the pattern. The main exposure techniques exist in the industry are projection printing, ...

EPFL2017

Novel manufacturing methods for optical antennas : controlling light down to the single nanometer scale

Valentin Flauraud

The resonant excitation of free electrons in metallic nanostructures enables extreme near field intensities along with a deep sub-wavelength localization of the electromagnetic energy. This has been exploited to enhance light-matter interaction down to the ...

EPFL2017

Micromechanics of Amorphous Metal/Polymer Hybrid Structures with 3D Cellular Architectures: Size Effects, Buckling Behavior, and Energy Absorption Capability

Stefano Mischler, Johann Michler, Cédric Frantz

By designing advantageous cellular geometries and combining the material size effects at the nanometer scale, lightweight hybrid microarchitectured materials with tailored structural properties are achieved. Prior studies reported the mechanical properties ...

Wiley-V C H Verlag Gmbh2017

A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors

Yusuf Leblebici, Mohammad Nasr Esfahani

Multi-scale integration remains the primary challenge in the fabrication of miniature piezoresistive sensors, as the co-fabrication of a silicon nanowire along with a microscale shuttle is the main architecture facilitating high-sensitivity transduction. T ...

Institute of Electrical and Electronics Engineers2017

In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement

Jürgen Brugger, Duncan Thomas Lindsay Alexander, Valentin Flauraud, Pamina Winkler, Raju Regmi

Optical nanoantennas have a great potential for enhancing light-matter interactions at the nanometer scale, yet fabrication accuracy and lack of scalability currently limit ultimate antenna performance and applications. In most designs, the region of maxim ...

American Chemical Society (ACS)2017