Concept

Chemical vapor deposition

Related lectures (32)

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Thin-Film Processing

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Chemical Vapour Deposition: Micro and Nanofabrication

Explores Chemical Vapour Deposition for micro and nanofabrication processes.

Chemical Vapor Deposition: Processes and Applications

Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Chemical Vapour Deposition Basics

Introduces the basics of Chemical Vapour Deposition, covering gas flow, pressure, and film growth kinetics.

Fabrication extended: Deposition

Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Chemical Vapor Deposition: Fundamentals and Techniques

Covers the fundamentals and techniques of Chemical Vapor Deposition (CVD), including mass transfer, film growth rate calculation, and various CVD techniques.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.

Chemical Vapour Deposition: Thin Films & Oxidation

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin Films: Deposition and Growth

Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Chemical Vapor Deposition: Si, SiN4, SiO2, Diamond

Explores LPCVD and PECVD processes for Si, SiN4, SiO2, and diamond in microelectronics applications.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.