Publications related to Fabless manufacturing

Metasurface-stabilized optical microcavities

Cavities concentrate light and enhance its interaction with matter. Confining to microscopic volumes is necessary for many applications but space constraints in such cavities limit the design freedom. Here we demonstrate stable optical microcavities by cou ...

Nature Portfolio2023

Piezoelectric suspended microchannel resonators

Damien Maillard

The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level. The systems developed for these purposes consist of piezoelectrica ...

EPFL2022

Shining Diamond: from Micro- and Nano-Engineering to Quantum Photonics

Sichen Mi

The discovery of room-temperature single photon emission from color centers in diamond has in recent years boosted research interest in this renowned material in photonics and quantum community and beyond. Following understanding some basic principles of h ...

EPFL2021

Exploring ferroelectricity in HfO2-based thin films by tackling application-relevant challenges

Matteo Cavalieri

Ferroelectric materials offer a broad range of application-relevant properties, including spontaneous polarization switchable by electric field. Archetypical representatives of this class of materials are perovskites, currently used in applications ranging ...

EPFL2021

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Luis Guillermo Villanueva Torrijo, Sayedeh Shirin Afyouni Akbari, Stefan Wagner

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...

2020

Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors

Yusuf Leblebici, Mohammad Nasr Esfahani, Mustafa Yilmaz

Silica nanowires spanning 10 μm-deep trenches are fabricated from different types of silsesquioxane-based precursors by direct e-beam patterning on silicon followed by release through deep reactive ion etching. Nanowire aspect ratios as large as 150 are ac ...

Institute of Physics2017

A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors

Yusuf Leblebici, Mohammad Nasr Esfahani

Multi-scale integration remains the primary challenge in the fabrication of miniature piezoresistive sensors, as the co-fabrication of a silicon nanowire along with a microscale shuttle is the main architecture facilitating high-sensitivity transduction. T ...

Institute of Electrical and Electronics Engineers2017

Miniaturized Dielectric Elastomer Actuator for Mechanical Stimulation of Monolayer Cell Cultures

Alexandre Poulin

This thesis advances the field of dielectric elastomer actuators (DEAs) through the development of device designs, fabrication processes, strain characterization technique and modelling tool. It provides the first demonstration that DEAs can be interfaced ...

EPFL2016

Graphene Field Effect Devices Operating in Differential Circuit Configuration

Davide Sacchetto, Yusuf Leblebici, Clemens Benedict Nyffeler

We study the concept of a basic building block for circuits using differential signaling and being based on graphene field effect devices. We fabricated a number of top-gated graphene FETs using commercially available graphene and employing electron beam l ...

Elsevier2015

Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts

Montserrat Fernandez-Bolanos Badia, Antonios Bazigos, Daniel Grogg

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring os ...

2014

A 6.7 MHz Nanoelectromechanical Ring Oscillator Using Curved Cantilever Switches Coated with Amorphous Carbon

Montserrat Fernandez-Bolanos Badia, Antonios Bazigos, Daniel Grogg

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digit ...

IEEE2014

Current-Mode Analog Adaptive Mechanism for Ultralow-Power Neural Networks

Rafal Tomasz Dlugosz

Neural networks (NNs) implemented at the transistor level are powerful adaptive systems. They can perform hundreds of operations in parallel but at the expense of a large number of building blocks. In the case of analog realization, an extremely low chip a ...

Institute of Electrical and Electronics Engineers2011

Fabrication of silicon nano wires and gate-all-around MOS devices

Didier Bouvet, Kirsten Emilie Moselund

The invention relates to methods for manufacturing semiconductor devices. Processes are disclosed for implementing suspended single crystal silicon nano wires (NWs) using a combination of anisotropic and isotropic etches and spacer creation for sidewall pr ...

2007

Stencil lithography : an ancient technique for advanced micro- and nano-patterning

Marc Antonius Friedrich van den Boogaart

This work describes the advancements made in micro and nano patterning via stencil lithography. Stencil lithography is a resist-less and direct pattern technique where a controlled amount of material is deposited through apertures on to a substrate in a va ...

EPFL2006

Guided-wave micro-electro-mechanical systems (MEMS) optical switches for telecommunication applications

Roland Guerre

The present thesis deals with Micro-Electro-Mechanical Systems (MEMS) optical switches for telecommunication applications. The aim is to study new type of microsystems for guided-wave optical switching applications. Two projects have been investigated. The ...

EPFL2005

New hybrid circuit breaker/current limiter with serial and parallel commutation assistance

This paper presents a new hybrid circuit breaker topology based on the use of serial and parallel semiconductors that allows to increase the supply voltage and default current with no arc, and to benefit from a current limitation function. A concrete marin ...

2004

New hybrid circuit breaker/current limiter with serial and parallel commutation assistance

This paper presents a new hybrid circuit breaker topology based on the use of serial and parallel semiconductors that allows to increase the supply voltage and default current with no arc, and to benefit from a current limitation function. A concrete marin ...

2004