Thermal oxidation

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Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

Explores the fabrication process of a CMOS inverter, covering thermal oxidation, doping processes, diffusion, ion implantation, and pattern transfer.

Covers the basics of CMOS gates and Logic Systems, highlighting the advantages of CMOS over TTL gates.

Explores the fabrication process of transistors, the structure of pn junction diodes, and the operation of bipolar transistors.

Covers charge transfer in CCD cameras, focusing on buried CCDs and their advantages over surface CCDs.

Explores the fabrication processes of silicon wafers and the operation of NPN bipolar transistors and MOSFETs.

Covers the control of threshold voltage in semiconductor devices through oxide thickness and substrate doping adjustments.

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

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