Concept

Etching (microfabrication)

Related lectures (32)

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Lab in a Tube: Design and Fabrication of Microfabricated Transducers

Covers the design and fabrication of microfabricated transducers for measuring liquid flow and temperature in small-diameter tubes, emphasizing hands-on prototyping and team collaboration.

Solid Ground Curing: Principles and Examples

Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.

Cleanroom Basics: Cleanroom Strategy

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Philippe Renault: A Journey in Micro-Technology

Honors Philippe Renault's journey in micro-technology, highlighting his pivotal role in establishing the CMI at EPFL.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.