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Concept
Etching (microfabrication)
Applied sciences
Electrical engineering
Electromechanics
Microelectromechanical systems
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Related units (6)
Microsystems Laboratory 1
EPFL
STI
IEM
LMIS1
IMX - Administration
EPFL
STI
IMX
IMX-GE
Advanced Nano-electromechanical Systems Laboratory
EPFL
STI
IGM
NEMS
Laboratory of Advanced Semiconductors for Photonics and Electronics
EPFL
SB
IPHYS
LASPE
Galatea Laboratory
EPFL
STI
IEM
GALATEA
IEM - Administration
EPFL
STI
IEM
IEM-GE
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