Lecture

Sensors: MEMS Advantages & Sensing Techniques

In course

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

Description

This lecture covers the content and schedule of the course, including live sessions, industrial seminars, and interactive sessions. It delves into photonic and integrated transducers, focusing on diamond photonics, photonic MEMS, MOEMS, and system integration. The instructor discusses the importance of sensors in micro and nanostructured devices, highlighting various research projects and acknowledgements. The lecture also explores MEMS sensors, their applications, and the different sensing techniques used in common sensors. Additionally, it explains the significance of MEMS sensors in robotics, the transition towards sensor hubs, and the specifications related to accuracy, precision, stability, and sensing techniques.

Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Official source

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