Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.
Explores charge density, electric field, Coulomb's law, and electric potential relationships, including forces between charges and the dominance of gravitational and electrostatic forces.
Covers the physical phenomena of electrostatic transduction, including charge accumulation, capacitance, and electrostatic force, with practical examples of sensors and actuators.
