Lecture

Microfabrication Techniques: Inspection and Metrology

Related lectures (32)

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Explores the fabrication of AFM tips and cantilevers, including tip sharpening, thermal oxidation, and the use of carbon nanotubes as probes.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Surface Profiling Techniques

Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Encapsulation: BCI

Covers the properties of Parylene, hermeticity, thin film encapsulation, conductive coatings, and electrode arrays.

Technologies: BioMEMS Overview

Covers BioMEMS technologies, materials, processes, and PDMS chemistry.

Introduction to Advanced MEMS

Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.

Microfabrication Technologies

Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Microfabrication Techniques: Tips and Sensors

Explores microfabrication techniques for nanotips and sensors, contact modes in AFM, capillary forces, and integrated sensors and actuators.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.