Lecture

Microfabrication Technologies

Related lectures (32)

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Cleanroom Basics: Cleanroom Strategy

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Cleanroom Basics: Introduction to Contamination Issues

Explores cleanroom basics and contamination issues in microfabrication processes, emphasizing the impact of contaminants on device performance and reliability.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Introduction to Advanced MEMS

Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.

Brain-Computer Interfaces: Silicon Technologies

Explores the design and fabrication of Brain-Computer Interfaces using silicon-based technologies and flexible materials, emphasizing key fabrication techniques and material properties.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Microfabrication Techniques: Inspection and Metrology

Explores microfabrication techniques for inspection and metrology in MEMS applications.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Solid Ground Curing: Principles and Examples

Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Microfabrication Techniques: Tips and Sensors

Explores microfabrication techniques for nanotips and sensors, contact modes in AFM, capillary forces, and integrated sensors and actuators.