Lecture

Wet Etching: Thin Films and Microfabrication

Related lectures (32)

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Flexible Devices: Fabrication and Applications

Explores the fabrication processes and properties of flexible devices and encapsulation techniques for flexible electronics.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Technologies: BioMEMS Overview

Covers BioMEMS technologies, materials, processes, and PDMS chemistry.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.