Covers X-Ray Micro-Analysis (XRMA) comparing techniques for analyzing matter with electron beams, discussing interaction volume, emission, fluorescence, and matrix effects.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Covers Energy Dispersive X-ray Microanalysis, explaining how X-rays reveal elemental composition and discussing X-ray generation, detection, efficiency, and quantification.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Explores the principles of Scanning Transmission Electron Microscopy (STEM) for analytical microscopy, covering TEM diffraction, detectors, and EDS analysis.