Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.
Explores interferometers' applications, lithography techniques, and nanostructure creation using interference lithography and EUV interference lithography.