Lectures related to Chemical Vapor Deposition: Fundamentals and Techniques

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Thin-Film Processing

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

Thin Films: Deposition and Growth

Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Evaporation Physics: Part I

Explores evaporation physics, covering contact angles, wetting states, diffusion, Fick's Law, and heat-mass transfer analogy.

Fabrication extended: Deposition

Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.

Thin Films: Growth and Interfaces

Explores dislocation motion, thin film growth models, and interface nature in modern technology.

Chemical Vapor Deposition: Oxide Formation and ALD

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Sputtering: Plasma Formation and Thin Film Deposition

Covers sputtering, plasma creation, and thin film deposition processes.

Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Film Growth: Growth Modes and Crystal Structure

Explores growth modes in film growth and crystal structure determination based on materials used.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Chemical Vapour Deposition: Micro and Nanofabrication

Explores Chemical Vapour Deposition for micro and nanofabrication processes.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.