Lectures related to Sputtering: Plasma Formation and Thin Film Deposition

Thin-Film Processing

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Plasma Physics: Breakdown in Gases

Explores breakdown in low-pressure gases, plasma physics applications, and the self-sustaining discharge phenomenon.

Film Growth: Growth Modes and Crystal Structure

Explores growth modes in film growth and crystal structure determination based on materials used.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, AC plasma processing, and ozone production.

Chemical Vapor Deposition: Oxide Formation and ALD

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Sputtering: Ion Target Interactions

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Sputtering: Film Growth and Control Parameters

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Sputtering in CMi

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.