Sensors Technologies ComparisonExplores sensor technologies in MEMS, focusing on pressure sensors, accelerometers, and gyroscopes, and highlights the significance of sensor fusion.
Flexible guidance theoryDiscusses the design and importance of flexible guides in microtechnology, highlighting their benefits and applications in MEMS devices.
Introduction to Advanced MEMSIntroduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.
Capacitive Sensors: AccelerometerExplores capacitive sensors, particularly accelerometers, covering design, operation, transfer functions, and conditioning techniques.