Lectures related to Micro and Nanofabrication for Optomechanics

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Nanofabrication: Techniques and Challenges

Explores nanofabrication techniques, challenges, and the use of silicon wafers.

Micro and Nanofabrication: Basics and Techniques

Covers the basics of micro and nano fabrication techniques for MEMS devices.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Physical Vapor Deposition: Evaporation Techniques

Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Advanced Nanomanufacturing: Lithography & Self-Assembly

Delves into advanced nanomanufacturing techniques, including lithography and block copolymer self-assembly for precise device fabrication.

Lithography: General Concepts and Mask Fabrication

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Lithography: Methods and Importance

Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Lithography: Fabrication Extended

Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Lithography: Tools and Techniques

Covers the principles and tools used in lithography for micro and nanofabrication.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Lithography: Nanoscale Patterning Techniques

Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.