Lecture

Etch Stop Techniques

Related lectures (32)

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Photovoltaic Cell Processing

Explores the fundamentals and processes for photovoltaic devices, including impurities in polysilicon, ingot growth methods, wire sawing, and the impact of cracks on wafer strength.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Standard Cell Processing: PERC, PERL and PERT

Explores standard cell processing techniques for silicon solar cells, including PERC, PERL, and PERT structures, focusing on efficiency and manufacturing challenges.

Solar Cells: Band Diagrams and Efficiency

Covers the principles of single solar cells, including band diagrams, efficiency, and the impact of illumination on performance.

Wet Etching: Chemical Reactions and Process Optimization

Explores the chemical reactions and optimization of isotropic wet etching in Si.

Introduction to Advanced MEMS

Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.