Covers advanced topics in MEMS technology, including design, packaging, device categories, historical perspective, market trends, and the role of startups.
Covers energy dissipation in VLSI chips, focusing on subthreshold current in NMOS transistors and the effects of threshold voltage on power consumption.
Explores MEMS resonators and oscillators, CMOS integration, frequency stability, temperature drift compensation, resonator packaging, and advanced resonator structures.