Lectures related to Chemical Vapor Deposition: Processes and Applications

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Chemical Vapour Deposition: Micro and Nanofabrication

Explores Chemical Vapour Deposition for micro and nanofabrication processes.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin-Film Processing

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Chemical Vapour Deposition: Thin Films & Oxidation

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Wet Etching: Sacrificial Layers

Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.

Thin Films: Deposition and Growth

Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

Fabrication extended: Deposition

Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.

Film Growth: Growth Modes and Crystal Structure

Explores growth modes in film growth and crystal structure determination based on materials used.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Ceramic Processing: Powders & Pieces

Explores ceramic pieces, powders, forming methods, thin films, and surfactants.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.