Lecture

Lithography: Mask and Laser Writing

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Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

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Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

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Covers the basics of micro and nano fabrication techniques for MEMS devices.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Lithography: Nanoscale Patterning Techniques

Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Lithography: Fabrication Extended

Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

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Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

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Clip Mask Fabrication

Showcases the practical steps of fabricating a mask for UV lithography.

Clip Mask Aligner Lithography

Covers UV lithography using a clip mask aligner for micro and nanofabrication.

Lithography: Methods and Importance

Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.

Lithography: Tools and Techniques

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Dry Etching of Organic and Metal Films

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AutoCAD Functions: Various Tools and Features

Covers a range of AutoCAD functions, including tools for drawing and dimension modification.