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Giacomo Benvenuti

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Related publications (7)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Scott Harada, Marc Jobin

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Andreea Veronica Savu, Scott Harada

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015

Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films

Patrik Willi Hoffmann, Estelle Wagner, Giacomo Benvenuti, Ali Dabirian, Yury Kuzminykh

Chemical vapour deposition (CVD) processes depend on the availability of suitable precursors. Precursors that deliver a stable vapour pressure are favourable in classical CVD processes, as they ensure process reproducibility. In high vacuum CVD (HV-CVD) pr ...

Elsevier2014