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Tristan Bret

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Related publications (5)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Gas assisted focused electron beam induced etching of alumina

Patrik Willi Hoffmann, Tristan Bret, Bamdad Afra

This study investigates focused electron beam induced etching for the removal of alumina particles on patterned extreme ultra violet (EUV) mask using nitrosyl chloride (NOCl) as assist gas. As potential contaminant, particles of aluminum oxide (alumina, Al ...

2009

Beam-induced etching of material on substrate involves directing gaseous compound which reacts in the presence of beam to etch the excess material which not etching the substrate

Patrik Willi Hoffmann, Xavier Multone, Tristan Bret

A method and apparatus for local beam processing using a beam activated gas to etch material are described. Compounds are disclosed that are suitable for beam-induced etching. The invention is particularly suitable for electron beam induced etching of chro ...

FEI CO (FEIF-Non-standard)2005

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

Radivoje Popovic, Giovanni Boero, Patrik Willi Hoffmann, Pavel Kejik, Niels Quack, Tristan Bret, Jürgen Brugger, Schahrazede-Lila Mouaziz

Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current ...

American Institute of Physics2005