Publications by Michele De Marchi

Low Temperature Wet Conformal Nickel Silicide Deposition for Transistor Technology through an Organometallic Approach

Giovanni De Micheli, Michele De Marchi, Pierre-Emmanuel Julien Marc Gaillardon, Tsung-Han Lin, Maxime Victor Thammasack, David Baudouin

The race for performance of integrated circuits is nowadays facing a downscale limitation. To overpass this nanoscale limit, modern transistors with complex geometries have flourished, allowing higher performance and energy efficiency. Accompanying this br ...

Amer Chemical Soc2017

Co-design of ReRAM Passive Crossbar Arrays Integrated in 180nm CMOS Technology

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto, Jury Sandrini, Pierre-Emmanuel Julien Marc Gaillardon, Tugba Demirci, Maxime Victor Thammasack, Marios Barlas

This work presents the co-integration of resistive random access memory crossbars within a 180nm Read-Write CMOS chip. TaOx-based ReRAMs have been fabricated and characterized with materials and process steps compatible with the CMOS Back-End-of ...

Institute of Electrical and Electronics Engineers2016

Polarity Control at Runtime : from Circuit Concept to Device Fabrication

Michele De Marchi

Semiconductor device research for digital circuit design is currently facing increasing challenges to enhance miniaturization and performance. A huge economic push and the interest in novel applications are stimulating the development of new pathways to ov ...

EPFL2015

Towards Functionality-Enhanced Devices: Controlling the Modes of Operation in Three-Independent-Gate Transistors

Giovanni De Micheli, Michele De Marchi, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

In this paper, we introduce the different modes of operation achievable with Three-Independent-Gate Field-Effect Transistors (TIGFETs) and report results on fabricated devices including: (i) the dynamic reconfiguration of the device polarity; (ii) t ...

2015

Top-Down Fabrication of Gate-All-Around Vertically-Stacked Silicon Nanowire FETs with Controllable Polarity

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

Asthe currentMOSFET scaling trend is facing strong limitations, technologies exploiting novel degrees of freedom at physical and architecture level are promising candidates to enable the continuation of Moore's predictions. In this paper, we report on the ...

Institute of Electrical and Electronics Engineers2014

Nanowire systems: technology and design (invited paper)

Giovanni De Micheli, Shashi Kanth Bobba, Michele De Marchi, Davide Sacchetto, Luca Gaetano Amarù, Pierre-Emmanuel Julien Marc Gaillardon

Nanosystems are large-scale integrated systems exploiting nanoelectronic devices. In this work, we consider double independent gate, vertically-stacked nanowire FETs with gate-all-around structures and typical diameter of 20-nm. These devices, which we hav ...

Royal Soc2014

A Schottky-Barrier Silicon FinFET with 6.0 mV/dec Subthreshold Slope over 5 Decades of Current

Giovanni De Micheli, Michele De Marchi, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

In this paper, we demonstrate a steep Subthreshold Slope (SS) silicon FinFET with Schottky-barrier source/drain. The device shows a minimal SS of 3.4 mV/dec and an average SS of 6.0 mV/dec over 5 decades of current swing. Ultra-low leakage floor of 0.06 pA ...

2014

Configurable Logic Gates Using Polarity Controlled Silicon Nanowire Gate-All-Around FETs

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

This work demonstrates the first fabricated 4-transistor logic gates using polarity-configurable, gate-all- around silicon nanowire transistors. This technology enhances conventional CMOS functionality by adding the degree of free- dom of dynamic polarity ...

Institute of Electrical and Electronics Engineers2014

Polarity-Controllable Silicon Nanowire Transistors with Dual Threshold Voltages

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

Gate-all-around (GAA) silicon nanowires enable an unprecedented electrostatic control on the semiconductor channel that can push device performance with continuous scaling. In modern electronic circuits, the control of the threshold voltage is essential fo ...

Institute of Electrical and Electronics Engineers2014

Ambipolar silicon nanowire field effect transistor

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto

This invention describes a novel electronic device consisting of one-or more-vertically stacked gate-all-around silicon nanowire field effect transistor (SNWFET) with two independent gate electrodes. One of the two gate electrodes, acting on the central se ...

2013

Towards Structured ASICs Using Polarity-Tunable SiNW Transistors, invited

Yusuf Leblebici, Giovanni De Micheli, Shashi Kanth Bobba, Michele De Marchi, Davide Sacchetto, Luca Gaetano Amarù, Pierre-Emmanuel Julien Marc Gaillardon

In addition to scaling semiconductor devices down to their physical limit, novel devices show enhanced functionality compared to conventional CMOS. At advanced technology nodes, many devices exhibit ambipolar behavior, i.e., they show n- and p-type charact ...

2013

Vertically Stacked Double Gate Nanowires FETs with Controllable Polarity: From Devices to Regular ASICs

Yusuf Leblebici, Giovanni De Micheli, Shashi Kanth Bobba, Michele De Marchi, Davide Sacchetto, Luca Gaetano Amarù, Pierre-Emmanuel Julien Marc Gaillardon

Vertically stacked nanowire FETs (NWFETs) with gate-all-around structure are the natural and most advanced extension of FinFETs. At advanced technology nodes, many devices exhibit ambipolar behavior, i.e., the device shows n- and p-type characteristics sim ...

2013

Process/Design Co-optimization of Regular Logic Tiles for Double-Gate Silicon Nanowire Transistors

Yusuf Leblebici, Giovanni De Micheli, Shashi Kanth Bobba, Michele De Marchi, Davide Sacchetto, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

Ambipolar transistors with on-line configurability to n-type and p-type polarity are desirable for future integrated circuits. Regular logic tiles have been recognized as an efficient layout fabric for ambipolar devices. In this work, we present a process/ ...

2012

Physical Synthesis onto Sea-of-Tiles with Double-Gate Silicon Nanowire Transistors

Yusuf Leblebici, Giovanni De Micheli, Shashi Kanth Bobba, Michele De Marchi

We have designed and fabricated double-gate ambipolar field-effect transistors, which exhibit p-type and n-type characteristics by controlling the polarity of the second gate. In this work, we present an approach for designing an efficient regular layout, ...

Ieee2012

Polarity Control in Double-Gate, Gate-All-Around Vertically Stacked Silicon Nanowire FETs

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto, Jian Zhang, Pierre-Emmanuel Julien Marc Gaillardon

We fabricated and characterized ambipolar Silicon Nanowire (SiNW) FET transistors featuring two independent Gate-All-Around (GAA) electrodes and vertically stacked SiNW channels. One of the gate electrodes is exploited to dynamically select the polarity of ...

2012

Alternative Design Methodologies for the Next Generation Logic Switch (invited paper)

Yusuf Leblebici, Giovanni De Micheli, Michele De Marchi, Davide Sacchetto

Next generation logic switch devices are ex- pected to rely on radically new technologies mainly due to the increasing difficulties and limitations of state-of-the-art CMOS switches, which, in turn, will also require innovative design methodologies that ar ...

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