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Stefan Mertin

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Related publications (13)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Clemens Benedict Nyffeler, Stefan Mertin, Andrea Mazzalai

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Paul Muralt, Thomas La Grange, Silviu Cosmin Sandu, Stefan Mertin, Ramin Matloub Aghdam, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Wiley-VCH Verlag2019

Growth, Properties, and Applications of Al1-xScxN Thin Films

Paul Muralt, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit govern ...

IEEE2019