Skip to main content

Search

Show all results for

Home

Person

Johana Bernasconi

This person is no longer with EPFL

About
Privacy
Disclaimer

Copyright © 2026 EPFL, all rights reserved

Graph Chatbot

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Related publications (6)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Hans Peter Herzig, Wilfried Noell, Toralf Scharf, Johana Bernasconi, Raoul Kirner

A high-power LED-based illumination system has been developed as a replacement for the mercury arc lamps used in mask-aligner lithography. LEDs are arranged in a grid array and placed in the entrance aperture of individual reflectors. Those reflectors decr ...

SPIE2019

High power modular LED-based illumination system for lithography applications

Hans Peter Herzig, Wilfried Noell, Marcel Groccia, Toralf Scharf, Johana Bernasconi, Raoul Kirner

Mask-aligner lithography is a technology used to transfer patterns with critical dimensions in the micrometer range from below 1 micron for contact printing to a dozen of microns in proximity printing. This technology is widely used in the fabrication of M ...

2018

High-power modular LED-based illumination systems for mask-aligner lithography

Hans Peter Herzig, Toralf Scharf, Johana Bernasconi

Mask-aligner lithography is traditionally performed using mercury arc lamps with wavelengths ranging from 250 nm to 600 nm with intensity peaks at the i, g and h lines. Since mercury arc lamps present several disadvantages, it is of interest to replace the ...

2018