Yuliya Lisunova

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Related publications (5)

Phase masks for electron microscopy fabricated by thermal scanning probe lithography

Jürgen Brugger, Oliver Peric, Simon Bonanni, Yuliya Lisunova

2019

Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface

Jürgen Brugger, Yuliya Lisunova

2018

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Jürgen Brugger, Yuliya Lisunova

Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication ...

Elsevier2017

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Jürgen Brugger, Yuliya Lisunova

Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the su ...

Nature Research2017

A single probe for imaging photons, electrons and physical forces

Yuliya Lisunova

The combination of complementary measurement techniques has become a frequent approach to improve scientific knowledge. Pairing of the high lateral resolution scanning force microscopy (SFM) with the spectroscopic information accessible through scanning tr ...

Iop Publishing Ltd2016

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