Publication

Ambipolar silicon nanowire FETs with stenciled sub-µm metal gate

Giovanni De Micheli, Jürgen Brugger, Andreea Veronica Savu, Davide Sacchetto, Yusuf Leblebici
2010
Conference Papers

Abstract

A fully CMOS compatible fabrication flow using low temperature a-Si LPCVD and stencil lithography has been developed and proved suitable for SiNW FinFETs having ambipolar conductance. The stencil mask has been demonstrated to be a real option for sub-micrometer metal gate patterning for the first time. It is worth noting that the flexibility of this process enables the deposition of several gate materials, bypassing the conventional fabrication issues related to material etch selectivity. Finally, the excellent performance of individual FinFETs paves the way for the fabrication of more complex circuits.

Official source

https://infoscience.epfl.ch/entities/publication/13639c8c-c2e4-4854-800f-2eb65cbb621a

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Giovanni De Micheli, Jürgen Brugger, Andreea Veronica Savu, Davide Sacchetto, Yusuf Leblebici
2010
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/13639c8c-c2e4-4854-800f-2eb65cbb621a

About this result

Related concepts (27)

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

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A resistor–capacitor circuit (RC circuit), or RC filter or RC network, is an electric circuit composed of resistors and capacitors. It may be driven by a voltage or current source and these will produce different responses. A first order RC circuit is composed of one resistor and one capacitor and is the simplest type of RC circuit. RC circuits can be used to filter a signal by blocking certain frequencies and passing others.

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