Publication

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core

Radivoje Popovic, Pavel Kejik, Ozge Zorlu
2007
Journal Articles

Abstract

In this paper, we present a new microfabricated orthogonal fluxgate sensor tructure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200uT, a sensitivity of 510 uV/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.

Official source

https://infoscience.epfl.ch/entities/publication/2bc3b546-a1b4-4501-be59-765369177d22

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Radivoje Popovic, Pavel Kejik, Ozge Zorlu
2007
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/2bc3b546-a1b4-4501-be59-765369177d22

About this result

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