Publication

Two-dimensional thermally actuated optical microprojection

Philippe Renaud, Sandra Schweizer, Gerhard Lammel
2000
Journal Articles

Abstract

A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular motions are given by the same "L"-shaped cantilever, which is simultaneously excited at non-resonance (frame scanning) and at resonance (raster scanning). The demonstration microdevice has a raster-scanning frequency at 1345 Hz that allows, if combined with 10 Hz sawtooth Game signal, the definition of more than 100 lines. Mechanical scan amplitudes over 15 degrees in two orthogonal directions were achieved. The typical power consumption is 5 mW. (C) 2000 Elsevier Science S.A. All rights reserved.

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https://infoscience.epfl.ch/entities/publication/6296f9b4-dee5-4c23-9dd9-bc730cc83e53

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Philippe Renaud, Sandra Schweizer, Gerhard Lammel
2000
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/6296f9b4-dee5-4c23-9dd9-bc730cc83e53

About this result

Related concepts (13)

Scanning probe microscopy

Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.

Scanning tunneling microscope

A scanning tunneling microscope (STM) is a type of microscope used for imaging surfaces at the atomic level. Its development in 1981 earned its inventors, Gerd Binnig and Heinrich Rohrer, then at IBM Zürich, the Nobel Prize in Physics in 1986. STM senses the surface by using an extremely sharp conducting tip that can distinguish features smaller than 0.1 nm with a 0.01 nm (10 pm) depth resolution. This means that individual atoms can routinely be imaged and manipulated.

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

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