Chemical vapor depositionChemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
Physical vapor depositionPhysical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.
Evaporation (deposition)Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film. Evaporation involves two basic processes: a hot source material evaporates and condenses on the substrate. It resembles the familiar process by which liquid water appears on the lid of a boiling pot.
Vacuum depositionVacuum deposition , also known as vacuum coating or thin-film deposition, is a group of processes used to deposit layers of material atom-by-atom or molecule-by-molecule on a solid surface. These processes operate at pressures well below atmospheric pressure (i.e., vacuum). The deposited layers can range from a thickness of one atom up to millimeters, forming freestanding structures. Multiple layers of different materials can be used, for example to form optical coatings.
Electron-beam physical vapor depositionElectron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.
Pulsed laser depositionPulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited. This material is vaporized from the target (in a plasma plume) which deposits it as a thin film on a substrate (such as a silicon wafer facing the target). This process can occur in ultra high vacuum or in the presence of a background gas, such as oxygen which is commonly used when depositing oxides to fully oxygenate the deposited films.
Abelian varietyIn mathematics, particularly in algebraic geometry, complex analysis and algebraic number theory, an abelian variety is a projective algebraic variety that is also an algebraic group, i.e., has a group law that can be defined by regular functions. Abelian varieties are at the same time among the most studied objects in algebraic geometry and indispensable tools for much research on other topics in algebraic geometry and number theory. An abelian variety can be defined by equations having coefficients in any field; the variety is then said to be defined over that field.
Algebraic varietyAlgebraic varieties are the central objects of study in algebraic geometry, a sub-field of mathematics. Classically, an algebraic variety is defined as the set of solutions of a system of polynomial equations over the real or complex numbers. Modern definitions generalize this concept in several different ways, while attempting to preserve the geometric intuition behind the original definition. Conventions regarding the definition of an algebraic variety differ slightly.
Substrate (materials science)Substrate is a term used in materials science and engineering to describe the base material on which processing is conducted. This surface could be used to produce new film or layers of material such as deposited coatings. It could be the base to which paint, adhesives, or adhesive tape is bonded. A typical substrate might be rigid such as metal, concrete, or glass, onto which a coating might be deposited. Flexible substrates are also used. With all coating processes, the condition of the surface of the substrate can strongly affect the bond of subsequent layers.
Projective varietyIn algebraic geometry, a projective variety over an algebraically closed field k is a subset of some projective n-space over k that is the zero-locus of some finite family of homogeneous polynomials of n + 1 variables with coefficients in k, that generate a prime ideal, the defining ideal of the variety. Equivalently, an algebraic variety is projective if it can be embedded as a Zariski closed subvariety of .
Elliptic geometryElliptic geometry is an example of a geometry in which Euclid's parallel postulate does not hold. Instead, as in spherical geometry, there are no parallel lines since any two lines must intersect. However, unlike in spherical geometry, two lines are usually assumed to intersect at a single point (rather than two). Because of this, the elliptic geometry described in this article is sometimes referred to as single elliptic geometry whereas spherical geometry is sometimes referred to as double elliptic geometry.
Chow varietyIn mathematics, particularly in the field of algebraic geometry, a Chow variety is an algebraic variety whose points correspond to effective algebraic cycles of fixed dimension and degree on a given projective space. More precisely, the Chow variety is the fine moduli variety parametrizing all effective algebraic cycles of dimension and degree in . The Chow variety may be constructed via a Chow embedding into a sufficiently large projective space.
Synthetic geometrySynthetic geometry (sometimes referred to as axiomatic geometry or even pure geometry) is geometry without the use of coordinates. It relies on the axiomatic method for proving all results from a few basic properties initially called postulate, and at present called axioms. The term "synthetic geometry" has been coined only after the 17th century, and the introduction by René Descartes of the coordinate method, which was called analytic geometry.
Euclidean geometryEuclidean geometry is a mathematical system attributed to ancient Greek mathematician Euclid, which he described in his textbook on geometry, Elements. Euclid's approach consists in assuming a small set of intuitively appealing axioms (postulates) and deducing many other propositions (theorems) from these. Although many of Euclid's results had been stated earlier, Euclid was the first to organize these propositions into a logical system in which each result is proved from axioms and previously proved theorems.
MembraneA membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Biological membranes include cell membranes (outer coverings of cells or organelles that allow passage of certain constituents); nuclear membranes, which cover a cell nucleus; and tissue membranes, such as mucosae and serosae.
Cell membraneThe cell membrane (also known as the plasma membrane or cytoplasmic membrane, and historically referred to as the plasmalemma) is a biological membrane that separates and protects the interior of a cell from the outside environment (the extracellular space). The cell membrane consists of a lipid bilayer, made up of two layers of phospholipids with cholesterols (a lipid component) interspersed between them, maintaining appropriate membrane fluidity at various temperatures.
Endomembrane systemThe endomembrane system is composed of the different membranes (endomembranes) that are suspended in the cytoplasm within a eukaryotic cell. These membranes divide the cell into functional and structural compartments, or organelles. In eukaryotes the organelles of the endomembrane system include: the nuclear membrane, the endoplasmic reticulum, the Golgi apparatus, lysosomes, vesicles, endosomes, and plasma (cell) membrane among others.
Stress (mechanics)In continuum mechanics, stress is a physical quantity that describes forces present during deformation. An object being pulled apart, such as a stretched elastic band, is subject to tensile stress and may undergo elongation. An object being pushed together, such as a crumpled sponge, is subject to compressive stress and may undergo shortening. The greater the force and the smaller the cross-sectional area of the body on which it acts, the greater the stress. Stress has units of force per area, such as newtons per square meter (N/m2) or pascal (Pa).
Projective geometryIn mathematics, projective geometry is the study of geometric properties that are invariant with respect to projective transformations. This means that, compared to elementary Euclidean geometry, projective geometry has a different setting, projective space, and a selective set of basic geometric concepts. The basic intuitions are that projective space has more points than Euclidean space, for a given dimension, and that geometric transformations are permitted that transform the extra points (called "points at infinity") to Euclidean points, and vice-versa.
Generalized flag varietyIn mathematics, a generalized flag variety (or simply flag variety) is a homogeneous space whose points are flags in a finite-dimensional vector space V over a field F. When F is the real or complex numbers, a generalized flag variety is a smooth or complex manifold, called a real or complex flag manifold. Flag varieties are naturally projective varieties. Flag varieties can be defined in various degrees of generality. A prototype is the variety of complete flags in a vector space V over a field F, which is a flag variety for the special linear group over F.
