Publication

Development and characterization of EIS structures based on SiO2 micropillars and pores before and after their functionalization with phosphonate films

Anna Fontcuberta i Morral, Anna Dalmau Mallorquí
2011
Journal Articles

Abstract

In this work electrolyte insulator semiconductor (EIS) structures based on lithographically fabricated Si SiO2 micropillars and pores are studied. The samples are characterized by means of impedance spectroscopy (IS) and they are compared to samples with a planar SiO2 layer on a Si substrate in order to determine whether the increase in active surface is directly related to an increase in sensitivity of the device. Our initial results confirm this question in the case of the pillar samples but not for the pore ones, most likely due to some fabrication issues that must be improved. Afterwards the SiO2 surface is functionalized with posphonates and the influence of the modification is studied using IS. Also, the stability and limits of applicability of the functionalized devices is studied. Analysis with X-ray photoelectron spectroscopy (XPS) is used to show that the deposition of phosphonates was successful. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

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https://infoscience.epfl.ch/entities/publication/a4feb1b1-ea3c-40bf-8119-d22ef8b5bc95

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Anna Fontcuberta i Morral, Anna Dalmau Mallorquí
2011
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/a4feb1b1-ea3c-40bf-8119-d22ef8b5bc95

About this result

Related concepts (25)

X-ray photoelectron spectroscopy

X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique based on the photoelectric effect that can identify the elements that exist within a material (elemental composition) or are covering its surface, as well as their chemical state, and the overall electronic structure and density of the electronic states in the material. XPS is a powerful measurement technique because it not only shows what elements are present, but also what other elements they are bonded to.

Silicon dioxide

Silicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz. In many parts of the world, silica is the major constituent of sand. Silica is one of the most complex and most abundant families of materials, existing as a compound of several minerals and as a synthetic product. Notable examples include fused quartz, fumed silica, silica gel, opal and aerogels. It is used in structural materials, microelectronics (as an electrical insulator), and as components in the food and pharmaceutical industries.

Photoemission spectroscopy

Photoemission spectroscopy (PES), also known as photoelectron spectroscopy, refers to energy measurement of electrons emitted from solids, gases or liquids by the photoelectric effect, in order to determine the binding energies of electrons in the substance. The term refers to various techniques, depending on whether the ionization energy is provided by X-ray, XUV or UV photons. Regardless of the incident photon beam, however, all photoelectron spectroscopy revolves around the general theme of surface analysis by measuring the ejected electrons.

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