Publication

A second harmonic based resonance characterization method for MEMS electrostatic resonators

Ozge Zorlu, Mustafa Kangül, Furkan Gökçe, Eren Aydin
2018
Journal Articles

Abstract

This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics. (C) 2018 Elsevier B.V. All rights reserved.

Official source

https://infoscience.epfl.ch/entities/publication/af6d1faf-14bb-4e95-9f88-be6ff6b73ee7

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Ozge Zorlu, Mustafa Kangül, Furkan Gökçe, Eren Aydin
2018
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/af6d1faf-14bb-4e95-9f88-be6ff6b73ee7

About this result

Related concepts (32)

Resonator

A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones.

Electronic component

An electronic component is any basic discrete electronic device or physical entity part of an electronic system used to affect electrons or their associated fields. Electronic components are mostly industrial products, available in a singular form and are not to be confused with electrical elements, which are conceptual abstractions representing idealized electronic components and elements. Electronic components have a number of electrical terminals or leads.

Operational amplifier

An operational amplifier (often op amp or opamp) is a DC-coupled high-gain electronic voltage amplifier with a differential input and, usually, a single-ended output. In this configuration, an op amp produces an output potential (relative to circuit ground) that is typically 100,000 times larger than the potential difference between its input terminals. The operational amplifier traces its origin and name to analog computers, where they were used to perform mathematical operations in linear, non-linear, and frequency-dependent circuits.

Related publications (29)

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Tobias Kippenberg, Nils Johan Engelsen, Alberto Beccari

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

Nature Portfolio2024

A continuous-wave and pulsed X-band electron spin resonance spectrometer operating in ultra-high vacuum for the study of low dimensional spin ensembles

Giovanni Boero, Fabio Donati, Soyoung Oh

We report the development of a continuous-wave and pulsed X-band electron spin resonance (ESR) spectrometer for the study of spins on ordered surfaces down to cryogenic temperatures. The spectrometer operates in ultra-high vacuum and utilizes a half-wavele ...

Aip Publishing2024

Room-temperature quantum optomechanics using an ultralow noise cavity

Tobias Kippenberg, Nils Johan Engelsen, Alberto Beccari, Guanhao Huang

At room temperature, mechanical motion driven by the quantum backaction of light has been observed only in pioneering experiments in which an optical restoring force controls the oscillator stiffness1,2. For solid-state mechanical resonators in which oscil ...

Nature Portfolio2024