Publication

Direct and selective synthesis of a wide range of carbon nanomaterials by CVD at CMOS compatible temperatures

Giovanni De Micheli, László Forró, Sandro Carrara, Arnaud Magrez, Irene Taurino
2014
Conference Papers

Abstract

Biosensors benefit from specific nano- to monitor human metabolites [1], [2]. Moreover, small structuration of the active bio-interface layer. In this electrodes allow us to design many sensing sites, each perspective, a wide range of carbon nanomaterials including multi-walled carbon nanotubes (MWCNTs), nanographite and carbon nanowalls (CNWs) have been directly synthesised by chemical vapor deposition (CVD) on Pt microelectrodes for the first time down to CMOS-compatible temperatures. This integration process, extremely useful to develop nanostructured multi-sensing site biodevices, has been validated by testing sensors for glucose with enhanced and competitive performance. Moreover it paves the way to the full integration of CMOS circuits, nanostructures and bioprobes.

Official source

https://infoscience.epfl.ch/entities/publication/b60707cd-616a-43b5-b58d-5c8e74c41bec

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Giovanni De Micheli, László Forró, Sandro Carrara, Arnaud Magrez, Irene Taurino
2014
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/b60707cd-616a-43b5-b58d-5c8e74c41bec

About this result

Related concepts (25)

Chemical vapor deposition

Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

CMOS

Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", siːmɑːs, -ɒs) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFETs for logic functions. CMOS technology is used for constructing integrated circuit (IC) chips, including microprocessors, microcontrollers, memory chips (including CMOS BIOS), and other digital logic circuits.

7400-series integrated circuits

The 7400 series is a popular logic family of transistor–transistor logic (TTL) integrated circuits (ICs). In 1964, Texas Instruments introduced the SN5400 series of logic chips, in a ceramic semiconductor package. A low-cost plastic package SN7400 series was introduced in 1966 which quickly gained over 50% of the logic chip market, and eventually becoming de facto standardized electronic components. Over the decades, many generations of pin-compatible descendant families evolved to include support for low power CMOS technology, lower supply voltages, and surface mount packages.

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