PiezoelectricityPiezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.
Thin-film bulk acoustic resonatorA thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.
Quartz crystal microbalanceA quartz crystal microbalance (QCM) (also known as quartz microbalance (QMB), sometimes also as quartz crystal nanobalance (QCN)) measures a mass variation per unit area by measuring the change in frequency of a quartz crystal resonator. The resonance is disturbed by the addition or removal of a small mass due to oxide growth/decay or film deposition at the surface of the acoustic resonator. The QCM can be used under vacuum, in gas phase ("gas sensor", first use described by King) and more recently in liquid environments.
Love waveIn elastodynamics, Love waves, named after Augustus Edward Hough Love, are horizontally polarized surface waves. The Love wave is a result of the interference of many shear waves (S-waves) guided by an elastic layer, which is welded to an elastic half space on one side while bordering a vacuum on the other side. In seismology, Love waves (also known as Q waves (Quer: German for lateral)) are surface seismic waves that cause horizontal shifting of the Earth during an earthquake.
Electric fieldAn electric field (sometimes E-field) is the physical field that surrounds electrically charged particles and exerts force on all other charged particles in the field, either attracting or repelling them. It also refers to the physical field for a system of charged particles. Electric fields originate from electric charges and time-varying electric currents. Electric fields and magnetic fields are both manifestations of the electromagnetic field, one of the four fundamental interactions (also called forces) of nature.
Seismic waveA seismic wave is a mechanical wave of acoustic energy that travels through the Earth or another planetary body. It can result from an earthquake (or generally, a quake), volcanic eruption, magma movement, a large landslide, and a large man-made explosion that produces low-frequency acoustic energy. Seismic waves are studied by seismologists, who record the waves using seismometers, hydrophones (in water), or accelerometers.
Crystal oscillatorA crystal oscillator is an electronic oscillator circuit that uses a piezoelectric crystal as a frequency-selective element. The oscillator frequency is often used to keep track of time, as in quartz wristwatches, to provide a stable clock signal for digital integrated circuits, and to stabilize frequencies for radio transmitters and receivers. The most common type of piezoelectric resonator used is a quartz crystal, so oscillator circuits incorporating them became known as crystal oscillators.
SputteringIn physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised in science and industry—there, it is used to perform precise etching, carry out analytical techniques, and deposit thin film layers in the manufacture of optical coatings, semiconductor devices and nanotechnology products.
Sputter depositionSputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a "substrate" such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K).
Surface waveIn physics, a surface wave is a mechanical wave that propagates along the interface between differing media. A common example is gravity waves along the surface of liquids, such as ocean waves. Gravity waves can also occur within liquids, at the interface between two fluids with different densities. Elastic surface waves can travel along the surface of solids, such as Rayleigh or Love waves. Electromagnetic waves can also propagate as "surface waves" in that they can be guided along with a refractive index gradient or along an interface between two media having different dielectric constants.
S waveNOTOC In seismology and other areas involving elastic waves, S waves, secondary waves, or shear waves (sometimes called elastic S waves) are a type of elastic wave and are one of the two main types of elastic body waves, so named because they move through the body of an object, unlike surface waves. S waves are transverse waves, meaning that the direction of particle movement of a S wave is perpendicular to the direction of wave propagation, and the main restoring force comes from shear stress.
Rayleigh waveRayleigh waves are a type of surface acoustic wave that travel along the surface of solids. They can be produced in materials in many ways, such as by a localized impact or by piezo-electric transduction, and are frequently used in non-destructive testing for detecting defects. Rayleigh waves are part of the seismic waves that are produced on the Earth by earthquakes. When guided in layers they are referred to as Lamb waves, Rayleigh–Lamb waves, or generalized Rayleigh waves.
Thin filmA thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.
Surface acoustic waveA surface acoustic wave (SAW) is an acoustic wave traveling along the surface of a material exhibiting elasticity, with an amplitude that typically decays exponentially with depth into the material, such that they are confined to a depth of about one wavelength. SAWs were first explained in 1885 by Lord Rayleigh, who described the surface acoustic mode of propagation and predicted its properties in his classic paper. Named after their discoverer, Rayleigh waves have a longitudinal and a vertical shear component that can couple with any media like additional layers in contact with the surface.
Acoustic waveAcoustic waves are a type of energy propagation through a medium by means of adiabatic loading and unloading. Important quantities for describing acoustic waves are acoustic pressure, particle velocity, particle displacement and acoustic intensity. Acoustic waves travel with a characteristic acoustic velocity that depends on the medium they're passing through. Some examples of acoustic waves are audible sound from a speaker (waves traveling through air at the speed of sound), seismic waves (ground vibrations traveling through the earth), or ultrasound used for medical imaging (waves traveling through the body).
Electric potentialThe electric potential (also called the electric field potential, potential drop, the electrostatic potential) is defined as the amount of work energy needed per unit of electric charge to move this charge from a reference point to the specific point in an electric field. More precisely, it is the energy per unit charge for a test charge that is so small that the disturbance of the field under consideration is negligible.
Plasma-enhanced chemical vapor depositionPlasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creation of a plasma of the reacting gases. The plasma is generally created by radio frequency (RF) (alternating current (AC)) frequency or direct current (DC) discharge between two electrodes, the space between which is filled with the reacting gases.
Longitudinal waveLongitudinal waves are waves in which the vibration of the medium is parallel to the direction the wave travels and displacement of the medium is in the same (or opposite) direction of the wave propagation. Mechanical longitudinal waves are also called compressional or compression waves, because they produce compression and rarefaction when traveling through a medium, and pressure waves, because they produce increases and decreases in pressure.
Mechanical waveIn physics, a mechanical wave is a wave that is an oscillation of matter, and therefore transfers energy through a medium. While waves can move over long distances, the movement of the medium of transmission—the material—is limited. Therefore, the oscillating material does not move far from its initial equilibrium position. Mechanical waves can be produced only in media which possess elasticity and inertia. There are three types of mechanical waves: transverse waves, longitudinal waves, and surface waves.
Vacuum depositionVacuum deposition , also known as vacuum coating or thin-film deposition, is a group of processes used to deposit layers of material atom-by-atom or molecule-by-molecule on a solid surface. These processes operate at pressures well below atmospheric pressure (i.e., vacuum). The deposited layers can range from a thickness of one atom up to millimeters, forming freestanding structures. Multiple layers of different materials can be used, for example to form optical coatings.
