Publications associées à Microsystème électromécanique

An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

This article presents a triaxial micro electromechani-cal system (MEMS) capacitive accelerometer using a high-voltage biasing technique to achieve high resolution with ultralow power. The accelerometer system generates a differential pair of high voltages ...

Ieee-Inst Electrical Electronics Engineers Inc2024

Stencil-Based Selective Surface Functionalization of Silicon Nanowires in 3D Device Architectures for Next-Generation Biochemical Sensors

Yusuf Leblebici, Mohammad Nasr Esfahani, Ece Öztürk

Surface functionalization of 1D materials such as silicon nanowires is a critical preparation technology for biochemical sensing. However, existing nonselective functionalization techniques result in nonlocal binding and contamination, with potential devic ...

Amer Chemical Soc2024

VDMNav: Software Architecture for Aerodynamically Constrained Navigation on Small Fixed-Wing Drones

Jan Skaloud, Gabriel François Laupré

Navigation of drones is predominantly based on sensor fusion algorithms. Most of these algorithms make use of some form of Bayesian filtering with a majority employing an Extended Kalman Filter (EKF), wherein inertial measurements are fused with a Global N ...

2024

A 3D-Printed Functional Mems Accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-phot ...

IEEE2023

Front-End Circuits for Radiation-Hard Monolithic CMOS Sensors targeting High-Energy Physics Applications

Francesco Piro

Monolithic pixel sensors integrate the sensor matrix and readout in the same silicon die, and therefore present several advantages over the more largely used hybrid detectors in high-energy physics. They offer an easier detector assembly, lower cost, lower ...

EPFL2023

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Yves Bellouard, Olivier Bernard, Benedikt Hermann, Luca Muscarella

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore t ...

2023

Integrated silicon photonic MEMS

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi

Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and ...

SPRINGERNATURE2023

Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Herbert Shea, Amir Firouzeh, Edouard Franck Vincent Gustave Leroy, Vesna Bacheva, Aiste Balciunaite

The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoco ...

SPRINGERNATURE2023

Interactions of Cavitation Bubbles with Deformable Interfaces

Armand Baptiste Sieber

Cavitation is a topic that has long been of interest due to the large and growing range of applications associated with it. This is mainly because the collapse of cavitation bubbles releases a considerable amount of energy into the surrounding environment. ...

EPFL2023

3D printed fiber-optic nanomechanical bioprobe

Sandor Kasas, Jiangtao Zhou, Yiping Wang, Yuguang Chen

Ultrasensitive nanomechanical instruments, e.g. atomic force microscopy (AFM), can be used to perform delicate biomechanical measurements and reveal the complex mechanical environment of biological processes. However, these instruments are limited because ...

IOP Publishing Ltd2023

Bringing casting to microfabrication: processing and deformation of microcastings

Luciano Borasi

This work extends the range of pathways for the production of metallic microcomponents by downscaling metal casting. This is accomplished by using either of two different molding techniques, namely femtosecond laser micromachining or lithographic silicon m ...

EPFL2023

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

On the benefit of concurrent adjustment of active and passive optical sensors with GNSS & raw inertial data

Jan Skaloud, Davide Antonio Cucci, Kyriaki Mouzakidou

In airborne laser scanning a high-frequency trajectory solution is typically determined from inertial sensors and employed to directly geo-reference the acquired laser points. When low-cost MEMS inertial sensors are used, such as in lightweight unmanned ae ...

2022

3D printing of elastomeric mechanical sensors designed for human motion monitoring

Ryan Mitchell van Dommelen

In this thesis several advances are made to the emerging field of 3D printed mechanical sensors. Techniques and processes were developed to enable the integration of highly conductive, and capacitive and piezoresistive sensing features embedded within 3D p ...

EPFL2022

Lidar point-to-point correspondences for rigorous registration of kinematic scanning in dynamic networks

Jan Skaloud, Davide Antonio Cucci, Aurélien Arnaud Brun

With the objective of improving the registration of lidar point clouds produced by kinematic scanning systems, we propose a novel trajectory adjustment procedure that leverages on the automated extraction of selected reliable 3D point–to–point corresponden ...

2022

Topological aspects of non-centrosymmetric magnets

Priya Ranjan Baral

The concept of chirality has been influencing many branches of physics for centuries. On the other hand, study of topology and related concepts have recently been introduced to the physics community. Exotic quasiparticles, such as magnetic skyrmions emerge ...

EPFL2022

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Luis Guillermo Villanueva Torrijo, Silvan Stettler

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

Optimization and Real-Time Aspects of Aircraft Model-Based Navigation

Gabriel François Laupré

The Vehicle Dynamic Model (VDM) based navigation of fixed-wing drones determines the airborne trajectory in conjunction with Inertial Measurement Unit (IMU) sensors. Without Global Navigation Satellite Systems (GNSS) signals, this method estimates navigati ...

EPFL2022

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

Ultra low quantum decoherence nano-optomechanical systems

Mohammadjafar Bereyhi

Thermal motion of a room-temperature mechanical resonator typically dominates the quantum backaction of its position measurement. This is a longstanding barrier for exploring cavity optomechanics at room temperature. In order to enter the quantum regime of ...

EPFL2022