Nico de Rooij, Danick Briand, Terunobu Akiyama, Rokhaya Gueye
A System-in-Package (SiP) concept for the 3D-integration of a Single Wall Carbon Nanotube (SWCNT) resonator with its CMOS driving electronics is presented. The key element of this advanced SiP is the monolithic 3D-integration of the MEMS with the CMOS elec ...
SPIE - International Society of Optical Engineering2013