Publications associées à Microfabrication

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Yves Bellouard, Olivier Bernard, Benedikt Hermann, Luca Muscarella

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore t ...

2023

Bringing casting to microfabrication: processing and deformation of microcastings

Luciano Borasi

This work extends the range of pathways for the production of metallic microcomponents by downscaling metal casting. This is accomplished by using either of two different molding techniques, namely femtosecond laser micromachining or lithographic silicon m ...

EPFL2023

First developments towards producing inductive magnetic sensors using state-of-the-art photolithography techniques

Duccio Testa, Marcus Cemes, Ambrine Douhane

Inductive magnetic sensors are needed for tokamak operation to provide the low-frequency (LF) measurements leading to the equilibrium reconstruction and to monitor the higher frequency (HF) instabilities; the HF magnetic sensors are often also used as a ba ...

2023

Bacterial colonization in realistic environments: how mechanics impact biofilm formation in the wild and during infection

Tamara Rossy

A variety of physical inputs acts onto bacteria in nature. However, these are most often ignored in the studies of their physiology. There is now increasing evidence indicating that bacteria respond to physical stimuli, including mechanical forces. Yet, qu ...

EPFL2023

Laser-Induced Forward Transfer of Functional Microdevices

Zhiwei Yang

Laser-induced forward transfer (LIFT) technique is an emerging micro additive manufacturing (AM) technique that has been widely used to print a variety of materials. Distinguished from other nozzle-based AM techniques, LIFT operates without the existence o ...

EPFL2023

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

2D MoS2 Nanopores: Wafer-scale Fabrication and Monolayer Stability for Long-term Single-Molecule Sensing

Mukeshchand Thakur

Biologically inspired solid-state nanopores are artificial openings or apertures in thin membranes similar to natural protein ion channels in a lipid bilayer of cell membranes. In solid-state nanopores, a thin insulating membrane with single or multiple po ...

EPFL2022

Demonstrating and Unraveling a Controlled Nanometer-Scale Expansion of the Vacancy Defects in Graphene by CO2

Kumar Varoon Agrawal, Kuang-Jung Hsu, Luis Francisco Villalobos Vazquez de la Parra

A controlled manipulation of graphene edges and vacancies is desired for molecular separation, sensing and electronics applications. Unfortunately, available etching methods always lead to vacancy nucleation making it challenging to control etching. Herein ...

Wiley-VCH Verlag GmbH2022

Low and high frequency electromagnetic forces: numerical modelling and practical applications

Marco Riccardi

The understanding and manipulation of nanoscale analytes is a central theme in nanotechnology and has been one of the main driving forces behind the development of this field as we know it today. Furthermore, such a technology has the potential to also rev ...

EPFL2022

Low-Power Artificial Neural Network Perceptron Based on Monolayer MoS2

Aleksandra Radenovic, Andras Kis, Mukesh Kumar Tripathi, Guilherme Migliato Marega, Zhenyu Wang

Machine learning and signal processing on the edge are poised to influence our everyday lives with devices that will learn and infer from data generated by smart sensors and other devices for the Internet of Things. The next leap toward ubiquitous electron ...

2022

Wafer-scale MoS2 with water-vapor assisted showerhead MOCVD

Aleksandra Radenovic, Andras Kis, Mukesh Kumar Tripathi, Mukeshchand Thakur, Michal Daniel Macha, Yanfei Zhao, Hyungoo Ji, Jing Zhang

Among numerous thin film synthesis methods, metalorganic chemical vapor deposition performed in a showerhead reactor is the most promising one for broad use in scalable and commercially adaptable two-dimensional material synthesis processes. Adapting the m ...

ROYAL SOC CHEMISTRY2022

Design and Manufacturing of an Electrostatic MEMS Relay for High Power Applications

Yves Perriard, Yoan René Cyrille Civet, Christian Köchli, Florian Louis Copt

This paper addresses the design and manufacturing of a crab-leg based MEMS relay for a high power application. Thanks to a contact resistance lower than 100 mΩ, the relay can hold a current in the order of magnitude of an Ampere without further thermal lim ...

2021

Highly motile nanoscale magnetic artificial cilia

Yves Bellouard, Tanveer Ul Islam

Among the many complex bioactuators functioning at different scales, the organelle cilium represents a fundamental actuating unit in cellular biology. Producing motions at submicrometer scales, dominated by viscous forces, cilia drive a number of crucial b ...

National Academy of Sciences2021

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli, Victor Plessky

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high f ...

IEEE2021

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Herbert Shea, Samuel Rosset, Giulio Grasso

Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Multi-material and Multi-functional Optical Fibers: Fabrication and Opportunities

Fabien Sorin

The fabrication challenges and application opportunities associated with the integration of novel materials at the micro- and nano-scale and prescribed positions within rigid and soft optical fibers will be presented. (C) 2020 The Author(s) ...

IEEE2020

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Tobias Kippenberg, Rui Ning Wang, Mikhail Churaev, Junqiu Liu, Tianyi Liu

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well ...

IEEE2020

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Henning Paul-Julius Stahlberg

Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization ...

2020

Transient Electronics for Smart Biodegradable Medical Implants

Matthieu Jean Michel Rüegg

Bioresorbable implantable medical devices show great potential for applications requiring medical care over well-defined periods of time. Such implants naturally degrade and resorb in the body, which eliminates adverse long-term effects or the need for a s ...

EPFL2020

NMR microsystem for label-free characterization of 3D nanoliter microtissues

Jürgen Brugger, Giovanni Boero, Marco Grisi, Gaurasundar Marc Conley, Kyle Joel Rodriguez, Lukas Egli, Erika Riva

Performing chemical analysis at the nanoliter (nL) scale is of paramount importance for medicine, drug development, toxicology, and research. Despite the numerous methodologies available, a tool for obtaining chemical information non-invasively is still mi ...

Nature Research2020