Henning Paul-Julius StahlbergPositions:
Since 2020 Prof. Physics, IPHYS, SB, EPFL, Switzerland 2009 – 2021 Prof. Structural Biology, Biozentrum, University Basel, Switzerland
2009 – 2010 Adj. Assoc. Prof. Molecular & Cellular Biology, UC Davis, CA, USA
2007 – 2009 Assoc. Prof. Molecular & Cellular Biology, UC Davis, CA, USA
2003 – 2007 Assist. Prof. Molecular & Cellular Biology, UC Davis, CA, USA
Education: 2002 Habilitation, Biozentrum, University Basel, Switzerland 1997 – 2003 Postdoctoral Fellow, Biozentrum, University Basel, Switzerland 1992 – 1997 PhD Student, EPFL, Lausanne, Switzerland 1990 – 1991 Diploma Thesis in Solid State Physics, TU Berlin, Germany 1987 – 1993 Study of Physics, TU Berlin, Germany Selected Awards & Honors: 2009 W.M.Keck Award 2004 CAREER award, NSF, USA 2002 Habilitation, University Basel, Switzerland Selected Memberships: 2008 – 2013 Chancellor’s Fellow Award, UC Davis, CA, USA 2004 – 2009 Faculty of 1000 Since 1992 Swiss Society for Optics and Microscopy (SSOM)
Philippe BuffatBorn in Lausanne (Switzerland) in 1942. EPUL physics engineer diploma in 1967 and EPFL PhD in physics in 1976. From 1966 he studies at the Experimental Physics Laboratory (Prof. J.P. Borel) the physical properties peculiar to the very small size metal crystals and gets a PhD degree for his thesis "Abaissement de la température de fusion de petits cristaux d'or par effet de taille thermodynamique" (Lowering of the melting temperature of small gold crystals by thermodynamic size effect). In 1971, he starts to develop an electron microscopy facility available to all EPFL students and researchers (nowadays Centre Interdisciplinaire de Microscopie Electronique CIME) that he manages till 2007. In parallel he teaches the principles of electron microscopy and the Experimental methods of physics at the Physics/Basic Sciences School (SB). In addition, he trains a large part of the facility users. Honorary professor BS/EPFL he carries-out a free-lance research at CIME and in collaboration with the Institute of Crystallography of the Russian Academy of Sciences (ICRAS, Moscow) and the International Centre of Electron Microscopy for Material Science (IC-EM AGH Krakow) This activity covers all the techniques related to transmission and scanning electron microscopy applied to materials science and solid-state physics. His interest is directed towards the structure of nanocrystals, their size effects and behavior under strong electron irradiation, the phase transitions in perovskites, the characterization of nanophases, multilayer and interface structures of crystalline materials and bioceramics. More recently a large research part has moved to understanding/pointing-out the adequacy between the limits of the instruments and their interpretation means in regard of their use in a multiusers facility with a large turnover and a wide range of materials/structures. He is past-president (2006-2007) of the Société Française des Microscopies (Sfµ), honorary member of the Sfµ and of the Swiss Society of Optics and Microscopy (SSOM).
Nicolas GrandjeanNicolas Grandjean received a PhD degree in physics from the University ofNice Sophia Antipolis in 1994 and shortly thereafter joined the French National Center for Scientific Research (CNRS) as a permanent staff member. In 2004, he was appointed tenure-track assistant professor at the École polytechnique fédérale de Lausanne (EPFL) where he created the Laboratory for advanced semiconductors for photonics and electronics. He was promoted to full professor in 2009. He was the director of the Institute of Condensed Matter Physics from 2012 to 2016 and then moved to the University of California at Santa Barbara where he spent 6 months as a visiting professor. Since 2018, he is the head of the School of Physics at the EPFL. He was awarded the Sandoz Family Foundation Grant for Academic Promotion, received the “Nakamura Lecturer” Award in 2010, the "Quantum Devices Award” at the 2017 Compound Semiconductor Week, and “2016 best teacher” award from the EPFL Physics School. His research interests are focused on the physics of nanostructures and III-V nitride semiconductor quantum photonics.
César PulgarinProf. C. Pulgarin is Chemist from Lausanne University, Master in environmental chemistry from Geneva University, Ph D in synthesis bio-inspired of natural substances from Neuchâtel University. During his education he carried out several industrial trainings.
Since March 1989, he has been working at the EPFL where he is leader of the Advanced Oxidation Processes Group (GPAO) active in the development chemical, photochemical, electrochemical, ultrasonic processes, their coupling between them and with biological systems to degrade chemical and microbiological pollutants in water and air. He has an H index of 40 and he is the world most cited author in 1) TiO2 photo-assisted bacterial inactivation in water and 2) Coupling of photochemical and biological processes for pollutant degradation. He has been involved in ten African, South American and European international research projects. He has been Swiss representative in COST program 540.
Klaus KernKlaus Kern is Professor of Physics at EPFL and Director and Scientific Member at the Max-Planck-Institute for Solid State Research in Stuttgart, Germany. He also is Honorary Professor at the University of Konstanz, Germany. His present research interests are in nanoscale science, quantum technology and in microscopy at the atomic limits of space and time. He holds a chemistry degree and PhD from the University of Bonn and a honorary doctors degree from the University of Aalborg. After his doctoral studies he was staff scientist at the Research Center Jülich and visiting scientist at Bell Laboratories, Murray Hill before joining the Faculty of EPFL in 1991 and the Max-Planck-Society in 1998. Professor Kern has authored and coauthored close to 700 scientific publications, which have received nearly 60‘000 citations. He has served frequently on advisory committees to universities, professional societies and institutions and has received numerous scientific awards and honors, including the 2008 Gottfried-Wilhelm-Leibniz Prize and the 2016 Van‘t Hoff Prize. Prof. Kern has also educated a large number of leading scientists in nanoscale physics and chemistry. During the past twenty-five years he has supervised one hundred PhD students and sixty postdoctoral fellows. Today, more than fifty of his former students and postdocs hold prominent faculty positions at Universities around the world.
Cécile HébertCécile Hébert est née en France, en 1970. Elle a obtenu son diplôme d'ingénieure (option physique) puis son doctorat ("Etude d'un nouveau filtre d'énergie des électrons pour le microscope électronique à transmission") à l'Ecole centrale de Paris. Doctorante dans le laboratoire du professeur Jouffrey, elle a créé un nouveau filtre d'énergie des électrons, pour le microscope électronique à transmission, qui a été breveté par le CNRS.
En tant que post-doctorante dans le laboratoire du professeur Schattschneider, elle a mené à bien une étude marquante sur la simulation des structures fines des seuils de perte d'énergie des électrons en comparaison avec l'expérience. En 2005, elle a été l'une des actrices principales dans l'élaboration du projet européen CHIRALTEM visant à développer dans le microscope électronique à transmission une méthode similaire à la méthode XMCD (X Ray Magnetic Circular Dichroism) connue en spectrométrie d'absorption des rayons X.
Nava SetterNava Setter completed MSc in Civil Engineering in the Technion (Israel) and PhD in Solid State Science in Penn. State University (USA) (1980). After post-doctoral work at the Universities of Oxford (UK) and Geneva (Switzerland), she joined an R&D institute in Haifa (Israel) where she became the head of the Electronic Ceramics Lab (1988). She began her affiliation with EPFL in 1989 as the Director of the Ceramics Laboratory, becoming Full Professor of Materials Science and Engineering in 1992. She had been Head of the Materials Department in the past and more recently has served as the Director of the Doctoral School for Materials.
Research at the Ceramics Laboratory, which Nava Setter directs, concerns the science and technology of functional ceramics focusing on piezoelectric and related materials: ferroelectrics, dielectrics, pyroelectrics and also ferromagnetics. The work includes fundamental and applied research and covers the various scales from the atoms to the final devices. Emphasis is given to micro- and nano-fabrication technology with ceramics and coupled theoretical and experimental studies of the functioning of ferroelectrics.
Her own research interests include ferroelectrics and piezoelectrics: in particular the effects of interfaces, finite-size and domain-wall phenomena, as well as structure-property relations and the pursuit of new applications. The leading thread in her work over the years has been the demonstration of how basic or fundamental concepts in materials - particularly ferroelectrics - can be utilized in a new way and/or in new types of devices. She has published over 450 scientific and technical papers.
Nava Setter is a Fellow of the Swiss Academy of Technical Sciences, the Institute of Electrical and Electronic Engineers (IEEE), and the World Academy of Ceramics. Among the awards she received are the Swiss-Korea Research Award, the ISIF outstanding achievement award, and the Ferroelectrics-IEEE recognition award. In 2010 her research was recognized by the European Union by the award of an ERC Advanced Investigator Grant. Recently she received the IEEE-UFFC Achievement Award (2011),the W.R. Buessem Award(2011), the Robert S. Sosman Award Lecture (American Ceramics Society) (2013), and the American Vacuum Society Recognition for Excellence in Leadership (2013).
Karen ScrivenerDe nationalité anglaise, Karen Scrivener est née en 1958. Au cours de sa carrière, ses travaux et sa recherche traitaient des domaines suivants: Identification du développement microstucturale pendant l'hydratation du ciment. Elaboration d'une approche multitechnique pour étudier la microstucture des ciments et bétons, avec accent sur la quantification par analyse des images d'électrons retrodiffusés. Caractérisation de l'auréole de transition de la pâte de ciment autour des granulats. Compréhension des processus de dégardation des bétons, en particulier le gonflement lié à la formation de l'éttringite retardée dans les bétons étuvés.
Cyril CayronMes recherches: J'ai travaillé comme microscopiste/cristallographe/métallurgiste sur des projets très variés comme les aciers pour le nucléaire, les alliages titane et nickel pour l'aéronautique, les interconnections en cuivre pour la microélectronique, les piles à combustible haute et basse température, le silicium photovoltaïque hétérojonction et monolike, les batteries au lithium à base de LiFePO4 et silicium. Derrière la plupart de ces sujets de recherche appliquée se cachent des problèmes de recherche fondamentale comme celui lié aux transformations de phases. J'ai donc été amené à travailler sur ce sujet passionnant et j'ai pu démontrer que les variants cristallographiques générés par des transitions structurales forment une structure algébrique de groupoïde. Ces travaux ont mené au développement du logiciel de reconstruction des grains parents à partir de données EBSD appelé ARPGE et distribué dans plus de 20 pays. En 2013-2015 j'ai proposé un nouveau modèle cristallographique pour les transformations martensitiques fcc-bcc dans les aciers, comme une alternative à la théorie phénoménologique de la transformation martensitique. Ce modèle a été depuis étendu aux transformations fcc-hcp (type cobalt), bcc-hcp (type titane) et bcc-fcc (type laiton), ainsi qu’à differents modes de maclage mécanique dans les métaux fcc et hcp. Ce modèle à sphères dures montre que la transformation implique une «distorsion angulaire», forme plus générale que le cisaillement. Le modèle prévoit la possibilité que le plan d’interface de certaines macles mécaniques ne soit pas un plan invariant. Un tel cas de maclage « exotique » a été observé expérimentalement par EBSD en 2017 dans un monocristal de magnésium pur. Je travaille maintenant à définir de manière algébrique les concepts de variants (orientation, distortion, correspondance), et sur les types de macles mécaniques (I, II, et d'autres oubliés des théoriques classiques). Mon parcours : 2014-maintenant: Collaborateur scientifique à l'EPFL/LMTM, Neuchâtel, Suisse. J'aide le professeur Roland Logé dans ses travaux de recherche sur les liens entre les fortes déformations, les textures, les tailles de grains et les transformations de phases (diffusives et displacives). Je suis en charge de la salle de métallographie et des caractérisations SEM, EDS, EBSD, TEM, HRTEM. Je codirige trois thèses (Annick Baur, Margaux Larcher, Céline Guidoux). Je suis reviewer pour Acta Mater., Scripta Mater., Acta Cryst., J. Appl. Cryst., Mater. Charact., etc. 2000-2014: Ingénieur de recherche et responsable du groupe Nanocaractérisation, CEA/LITEN, Grenoble, France. 2012 : Habilitation à Diriger des Recherches (HDR). 1996-2000: Thèse sur l'étude par microscopie électronique de composites à matrice aluminium. Directeur de thèse Philippe Buffat, CIME, EPFL, Lausanne, Suisse. J'ai pu montrer un lien cristallographique entre différentes phases des alliages 2xxx et 6xxx et proposer pour la première fois une structure complète pour la phase beta prime des nanoprécipités. 1995-1996: Scientifique du contingent, travail sur les écrans électrochromes, COGIDEV, Rueil-Malmaison, France, fondé par M. André Giraud, ancien ministre de la défense et ancien ministre de l’industrie. 1992-1995: Ecole Nationale Supérieure des Mines de Nancy, France
Marco Cantoni1982-1988, Diploma course in Experimental Physics (certificate, 28.10.88)ETHZ Faculty IX MATHEMATICS and PHYSICS, Diploma Thesis: "Abweichungen von der ikosaedrischen Symmetrie in Al-Cu-Li Quasikristallen", Advisor: Prof. H.-U. Nissen 1989-1993, Ph.D. in Experimental Physics (certificate, 23.8.94) ETHZ Physics Department, Laboratory of Solid State Physics, Ph. D. Thesis No. 10421, Title: "Elektronenmikroskopische Untersuchung der Realkristallstruktur epitaktischer Schichten von Supraleitern des Typs SEBa2Cu3O7-x auf (100)-SrTiO3" Advisors: Prof. H.R. Ott, Prof. H. U. Nissen. 1994-1996,ETH Zürich,Material Science Department, Non-Metallic Materials, Prof. L. Gauckler: Microstructure characterisation of high-tech ceramic materials by means of SEM, TEM and atomic force microscopy: superconductor thick films (Bi-2212 on Ag) and solid oxide fuel cells (ZrO2, CeO2). 1996-1998, National Institute for Research in Inorganic Materials NIRIM, Japan Group for Special Research, Prof. S. Horiuchi: TEM of Bi-2223/Ag Tapes, Application of Imaging Plates (IP) in High Voltage TEM, Cryo-Lorentz-TEM of Superconducting Materials (Observation of Flux-Lines) 1998-2000, Ecole polytechnique fédéral de Lausanne, EPFL-CIME Centre interdépartemental de microscopie électronique CIME, Prof. P.A. Buffat: Projet 125, PPO II (programme prioritaire optique): Characterization of materials and devices for optic and optoelectronic applications by electron microscopy. 2001-2003, Ecole polytechnique fédéral de Lausanne, EPFL STI IMX LCCeramics Laboratory, Prof. Nava Setter Characterisation of ferroelectric materials, transmission electron microscopy of relaxor ferroelectric materials 2004, University of Geneva, Physics Department, Condensed matter Physics Group of Prof. R. Flükiger, TEM of Multifilament Nb3Sn superconducting wires, in collaboration with EPFL-CIME Since 1.11.04, EPFL-SB-CIME
Giorgio MargaritondoDe nationalité américaine et suisse, Giorgio Margaritondo est né à Rome (Italie) en 1946. Il a reçu la Laurea cum laude en physique de l'Université de Rome en 1969. De 1969 à 1978, il a travaillé pour le Consiglio Nazionale delle Ricerche (CNR), à Rome, à Frascati et, pendant la période 1975-1977, chez Bell Laboratories aux Etats-Unis. De 1978 à 1990, il est professeur de physique à l'Université du Wisconsin, à Madison (Etats-Unis); en 1984, il est nommé vice-directeur au Centre de rayonnement synchrotron de la même université. En 1990, il est engagé à l'EPFL comme professeur ordinaire et dirige l'Institut de physique appliquée au Département de physique. Il a été également membre honoraire du corps professoral de l'Université Vanderbilt à Nashville. En 2001 il a été nommé doyen de la Faculté des sciences de base de l'EPFL; en 2004, il a été nommé Vice-président pour les affaires académiques.; en 2010 et jusqu'à sa retraite de l'EPFL en 2016 il est devenu Doyen de la formation continue. A côté de ses cours de physique générale, son activité de recherche porte sur la physique des semiconducteurs et des supraconducteurs (états électroniques, surfaces, interfaces) et des systèmes biologiques; ses principales méthodes expérimentales sont la spectroscopie et la spectromicroscopie électroniques, l'imagerie aux rayons x et la microscopie SNOM, y compris les expériences avec le rayonnement synchrotron et le laser à électrons libres. Auteur d'environ 700 articles scientifiques et de 9 livres, il a aussi été responsable de 1995 à 1998 des programmes scientifiques du Synchrotron ELETTRA à Trieste. Depuis 1997, il a été le coordinateur de la table ronde de la Commission européenne pour le rayonnement synchrotron, et président du conseil de la "Integrated Initiative" de la Commission européenne pour les synchrotrons et les lasers à électrons libres (IA-SFS, ensuite ELISA), le plus grand réseau au monde de laboratoires dans ce domaine. En 2011-2015, il a été Editor-in-Chief du Journal of Physics D (Applied Physics). A présent, il est vice-président du conseil de l'Università della Svizzera Italiana (USI) et président du Scientific and Technological Committee de l'Istituto Italiano di Tecnologia (IIT). Il est "Fellow" de l'American Physical Society et de l'American Vacuum Society; il est également "Fellow and Chartered Physicist" de l'Institute of Physics.
Jan Van HerleNé à Anvers, Belgique, 1966. En Suisse depuis 1983. Naturalisé Suisse en 2004 par persuasion de la culture suisse démocratique et participative 'bottom-up'. Pas de double nationalité. Conseiller communal durant 2 mandats de 5 ans de 2006 à 2016.
1987 : Chimiste de l'Université de Bâle (CH).
1988 : Post-grade informatique de l'Ecole d'Ingénieurs de Bâle.
1989 : Stage industriel chez ABB à Baden (CH).
1990-1993 : Thesè EPFL
1994-1995 : Postdoc au Japon (Tokyo).
1996-2000 : Chercheur à l'EPFL, Dpt. Chimie, responsable de groupe.
1998-2000 : Master en Energy Technology, EPFL.
2000 : Cofondateur de HTceramix SA (EPFL spin-off), à Yverdon (actuellement 12 employés). La maison mère SOLIDpower en Italie, qui a acheté notre technologie en 2007, emploie 250 personnes et a levé 70 MCHF.
2000-2012 : 1er Assistant et chargé de cours en STI-IGM. Promu à MER en 2008.
2013-présent: MER responsable d'unité.
Output : 135 publications, 120 papiers de conférence, 15 théses de doctorat, 4 thèses en cours, 37 thèses de master. Facteur h-42, >5000 citations.
Fonds levés jusqu'à présent >19 MCHF.
5 langues couramment (néerlandais, français, allemand (y.c. suisse-allemand), anglais, espagnol).
Graham KnottGraham Knott received his degree in physiology from the University of Southampton, UK, in 1990, and his PhD in neuroscience from the University of Tasmania, Australia, in 1995. He moved to the University of Lausanne in Switzerland in 1999 where he researched the plasticity of neuronal connectivity in the adult brain, developing correlative light and electron microscopy methods for the analysis of in vivo imaged neurons. In 2006 Graham joined the Ecole Polytechnique Fédérale de Lausanne, establishing the Bio Electron Microscopy Facility and has continued his research interests in brain plasticity and 3D electron microscopy.
Hilal Lashuel2012-2013 Visiting Professor, Standford University. Stanford School of Medicine
2011- Associate Professor of Life Sciences-Brain Mind Institute-EPFL
Dir. Laboratory of Chemical Biology of Neurodegeneration
2005-2011 Assistant Professor of Life Sciences-Brain Mind Institute-EPFL
Dir. Laboratory of Molecular Neurobiology and Neuroproteomics
2005-2008 Director- EPFL Proteomic Core Facility
2002-2004 Instructor of Neurology- Harvard Medical School and Brigham and Women's
Hospital
2001-2002 Sabbatical Fellow- Laboratory for Drug Discovery in Neurodegeneration
Harvard Medical School,
2001-2002 Post-doctoral Fellow- Center for Neurologic Diseases
Harvard Medical School and Brigham and Women's Hospital
Advisor- Prof. Peter T. Lansbury
2000-2001 Research Scientist, The Picower Institute for Medical Research, Great Neck
New York
1994-2000 PhD Student; Texas A&M University and the Scripps Research Institute
Advisor- Prof. Jeffery W. Kelly
1990-1994 B.S. City University of New York, Brooklyn College
Dr. Hilal A. Lashuel received his B.Sc. degree in chemistry from the City University of New York in 1994 and completed his doctoral studies at Texas A&M University and the Scripps Research Institute in 2000. After obtaining his doctoral degree, he became a research fellow at the Picower Institute for Medical Research in Long Island New York. In 2001, he moved to Harvard Medical School and the Brigham and Women's Hospital as a research fellow in the Center for Neurologic Diseases and was later promoted to an instructor in neurology at Harvard Medical School. During his tenure (2001-2004) at Harvard Medical School his work focused on understanding the mechanisms of protein misfolding and fibrillogenesis and the role of these processes in the pathogenesis of Parkinson's and Alzheimer's disease. In 2005 Dr. Lashuel moved Switzerland to join the Brain Mind Institute at the Swiss Federal Institute of Technology Lausanne as a tenure-track assistant professor in neurosciences. Currently, Dr. Lashuel is an associate professor of life sciences and the director of the laboratory of molecular and chemical biology of neurodegeneration. (http://lashuel-lab.epfl.ch/).
Research efforts in the Lashuels laboratory focus on understanding the molecular mechanisms of neurodegeneration and developing novel strategies to diagnose and treat neurodegenerative diseases such as Alzheimers and Parkinsons disease. Research in the Lashuel lab is funded by several international funding agencies and foundations, including the Swiss National Science Foundation, European FP7 program (Marie Curie and ERC grants), Human Science Frontiers, Strauss Foundation, Cure the Huntingtons disease foundation and Michael J Fox foundation and is supported by collaborations with pharmaceutical and biotech companies (http://lashuel-lab.epfl.ch/page-50538-en.html), Nestle, Merck-Serono, AC Immune and Johnson and Johnson.
Dr. Lashuels research has resulted in the characterization of novel quaternary structure intermediates on the amyloid pathway, identification of potential therapeutic targets, and new hypotheses concerning the mechanisms of pathogenesis in Alzheimers disease, Parkinsons disease and related disorders. Dr. Lashuel scientific contribution to this field includes i) more than100 publications in major peer reviewed journals including Nature journals, Cell, PNAS, JBC, J. Neuroscience JACS, and Angewandtie Chemie; ii) three patents on novel strategies for preventing protein aggregation and treating autoimmune and inflammatory diseases; iii) more than 150 invited lectures since 2002 and more than 5500 citations (7800 citation-Google Scholar) since 1996. Dr. Lashuel has received several pre-doctoral and post-doctoral awards and fellowships and was the recipient of two prestigious awards given to young investigators; Human Science Frontiers young investigator research award and the European Research Council (ERC) starting independent researcher grant and the ERC proof of concept award (2013) These awards provide more than $2.5 Million to Dr. Lashuel to translate some of his ideas and projects into novel strategies for diagnosing and treating neurodegenerative diseases such as Alzheimers and Parkinsons disease. Dr. Lashuel has chaired and co-organized several international conferences and serves as an academic editor for PLoS ONE, an associate editor for frontiers of molecular neuroscience, member of the Editorial advisory board of ChemBioChem and ad hoc reviewer for several international scientific journals and funding agencies. Paul MuraltPaul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award.
Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/) 