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Hans Peter Herzig

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Publications associées (110)

Experimental evidence of Bloch surface waves on photonic crystals with thin-film LiNbO3 as a top layer

Maria-Pilar Bernal, Hans Peter Herzig, Myun Sik Kim

Strong nonlinear, electro-optical, and thermo-optical properties of lithium niobate (LN) have gained much attention. However, the implementation of LiNbO3 in real devices is not a trivial task due to difficulties in manufacturing and handling thin-film LN. ...

Optical Soc Amer2017

Near-field investigation of Bloch surface wave based 2D optical components

Hans Peter Herzig, Myun Sik Kim, Elsie Barakat, Richa Dubey, Babak Vosoughi Lahijani

We study the Bloch surface wave based nano-thin 2D optical components. The 2D elements are fabricated on the dielectric multilayer platform which sustains the Bloch surface waves. Such a platform is considered as a novel foundation for planar integrated op ...

Spie-Int Soc Optical Engineering2017

Unified rule based correction for corners in proximity lithography mask using high resolution features

Hans Peter Herzig, Toralf Scharf, Krishnaparvathy Puthankovilakam

Printing industry and printing techniques are increasing its market value by new methodologies. The resolution and accuracy of the pattern transfer is always a challenge for the industry, especially for the proximity printing industries which use mask alig ...

Elsevier2017

Scaling effect and its impact on wavelength-scale microlenses

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf

We revisit the scaling laws in micro-optical systems to highlight new phenomena arising beyond a conventional optical regime, especially when the size of the system approaches to the operational wavelength. Our goal is to visualize the impact of the scalin ...

Spie-Int Soc Optical Engineering2017

Binary zero-order diffractive and anti-reflective optical elements in silicon for the mid-infrared

Hans Peter Herzig, Grégoire Maxime Smolik

We propose a novel method for the design of binary 2-level diffractive optical elements that provide an efficient diffractive function while reducing the reflectivity of a high-index interface. The structure can be fabricated with a single patterning step ...

Optical Society of America2017

Experimental demonstration of critical coupling of whispering gallery mode cavities on Bloch surface wave platform

Hans Peter Herzig, Myun Sik Kim, Richa Dubey, Babak Vosoughi Lahijani

We experimentally demonstrate critical coupling of whispering gallery mode (WGM) disk resonators implemented on a Bloch surface wave platform using scanning near-field optical microscopy. The studied structure is a 60 nm thick TiO 2 TiO2 WGM disk cavity (r ...

Optical Society of America2017

Ultra-thin Bloch-surface-wave-based reflector at telecommunication wavelength

Hans Peter Herzig, Richa Dubey, Babak Vosoughi Lahijani

We experimentally demonstrate the optical properties of gratings engraved in a single-mode waveguide fabricated on top of a dielectric multilayer platform. The structure can be approached as a reflector for Bloch-surface-wavebased two-dimensional optical s ...

Optical Soc Amer2017

Structured amplitude and phase fields behind microstructures: The quest for high contrast modulation at proximity

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf, Johana Bernasconi, Krishnaparvathy Puthankovilakam

Microstructures can be used to realize repetitive and singular high contrast features at different distances behind a structure. For practical applications, the amplitude field needs to be considered. To realize defined amplitude features at long distances ...

Spie-Int Soc Optical Engineering2016

Coherence management in lithography printing systems

Hans Peter Herzig, Toralf Scharf, Johana Bernasconi

In proximity lithography, interference and diffraction effects arise when printing small features because of the proximity gap. Different techniques are used in order to control and take advantage of theses effects. In this paper, the focus is set on the M ...

Spie-Int Soc Optical Engineering2016

Refraction limit of miniaturized optical systems: a ball-lens example

Hans Peter Herzig, Wilfried Noell, Roland Andreas Bitterli, Myun Sik Kim, Toralf Scharf

We study experimentally and theoretically the electromagnetic field in amplitude and phase behind ball-lenses across a wide range of diameters, ranging from a millimeter scale down to a micrometer. Based on the observation, we study the transition between ...

Optical Society of America2016

Optics in 2D, Bloch surface wave phenomena and applications

Hans Peter Herzig, Myun Sik Kim, Elsie Barakat, Richa Dubey

Nano-photonics, where optical structures can manipulate light at the sub-wavelength scale, is making important advances towards optical communications, imaging and sensing. A novel platform suitable for fundamental investigations of light propagation throu ...

Ieee2016

Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf, Ali Naqavi, Krishnaparvathy Puthankovilakam

We try to find out the details of how light fields behind the structures of photomasks develop in order to determine the best conditions and designs for proximity printing. The parameters that we use approach real situations like structure printing at prox ...

SPIE-Intl Soc Optical Eng2016

2D photonic nanojet via Bloch surface wave: limitations and beyond

Hans Peter Herzig, Myun Sik Kim, Elsie Barakat, Richa Dubey

2016

Unconventional Optical Responses of Wavelength-scale Microlenses: beyond Refraction Limit

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf

Miniaturized optical systems show often unconventional responses compare to larger systems of the same design. We investigate such new phenomena using microlenses, and demonstrate characteristics beyond the refraction limit of the micro-optical systems. ...

Ieee2016

Nano-Thin 2D Axicon Generating Nondiffracting Surface Waves

Hans Peter Herzig, Myun Sik Kim, Elsie Barakat, Richa Dubey

We investigate nondiffracting surface waves. On top of the Bloch surface wave platform, a 60-nm-thick TiO2 isosceles triangle serves as a 2D axicon. Scanning near-field microscopy measurements verify nondiffracting surface beam properties. ...

Ieee2016

Design, simulation, and quality evaluation of micro-optical freeform beam shapers at different illumination conditions

Hans Peter Herzig, Daniel Infante Gómez

A design method to generate thin micro-optical freeform (MOF) beam shapers by clipping or wrapping an original and much thicker freeform surface is provided. MOF elements are situated at the border between refractive and diffractive optical elements. The i ...

Optical Soc Amer2016

Precision glass molding of high-resolution diffractive optical elements

Hans Peter Herzig, Toralf Scharf, Karin Prater

The demand of high resolution diffractive optical elements (DOE) is growing. Smaller critical dimensions allow higher deflection angles and can fulfill more demanding requirements, which can only be met by using electron-beam lithography. Replication techn ...

Spie-Int Soc Optical Engineering2016

Lightfields behind amplitude masks: Creating phase discontinuities

Hans Peter Herzig, Wilfried Noell, Myun Sik Kim, Toralf Scharf, Krishnaparvathy Puthankovilakam

Shaping of light fields behind amplitude and phase masks the basis the lithographic structure reproduction. The aerial image or better the intensity distribution defines the resolution of the structure to be printed. Contrast is the main parameter and to a ...

Ieee2016

Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf

We investigate the transition of optical regimes of miniaturized optical systems using two canonical examples, where the refraction of light limits the system performance. A ball-lens and a solid immersion lens (SIL) are considered, whose refractive respon ...

Spie-Int Soc Optical Engineering2016

Multilevel Micro-Structuring of Glassy Carbon Molds for Precision Glass Molding

Hans Peter Herzig, Toralf Scharf, Karin Prater

Replication techniques for diffractive optical elements (DOEs) in soft materials such as plastic injection molding are state of the art. For precision glass molding in glasses with high transition temperatures, molds with extreme thermal resistivity, low c ...

Spie-Int Soc Optical Engineering2015

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