Publications de Scott Harada | EPFL Graph Search

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Scott Harada, Marc Jobin

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Andreea Veronica Savu, Scott Harada

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015

A unique approach to reveal the nanocomposite nc-MN/SiN-layer architecture of thin films via electrical measurements

Rosendo Sanjines, Silviu Cosmin Sandu, Scott Harada

By addition of Si to a binary transition metal nitride MN (e.g. TiN, ZrN, NbN, CrN), the hardness, thermal stability and chemical inertness of films have been considerably improved. The formation of a ternary M–Si–N ternary phase is possible under specific ...

2010

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Jean-François Carlin, Paul Muralt, Denis Martin, Jürgen Brugger, Nicolas Grandjean, Evgeny Milyutin, Andreea Veronica Savu, Scott Harada

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

American Vacuum Society2010

Combinatorial Discovery and Optimization of Amorphous HfO2-Nb2O5 Mixture with Improved Transparency

Paul Muralt, Patrik Willi Hoffmann, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Bamdad Afra, Ali Dabirian, Yury Kuzminykh, Scott Harada

Combinatorial high vacuum chemical vapor deposition (HV-CVD) of mixed HfO2-Nb2O5 thin films has been demonstrated to yield amorphous layers at substrate temperatures where individually deposited pure HfO2 and Nb2O5 films are polycrystalline. Spectroscopic ...

Electrochemical Society2010

Strong improvement in the photonic stop-band edge sharpness of a lithium niobate photonic crystal slab

Paul Muralt, Maria-Pilar Bernal, Scott Harada

We report on a photonic crystal (PhC) etched into a 380 nm thick lithium niobate (LN) thin film deposited on a MgO substrate by pulsed laser deposition. The transmission properties of this device were assessed by optical near-field measurements and compare ...

AIP American Institute of Physics2009

Low temperature hydrothermal routes to various PZT stoichiometries

Scott Harada

The production of lead zirconate titanate (PZT) with a variation in Zr and Ti ratios using a hydrothermal method has been attempted. We show that when reactions are conducted at 160 degrees C, for 4 h, the phase of PZT produced is independent of the initia ...

Springer Verlag2008