Publication
The present invention relates to a cantilever or membrane comprising a body and an elongated beam attached to the body. The elongated beam includes a first layer comprising a first material, a second layer comprising a second material having an elastic modulus different to that of the first material, a third layer comprising a third material having an elastic modulus different to that of the first material, where the first layer is sandwiched between the second layer and the third layer.
John Martin Kolinski, Chenzhuo Li, Xinyue Wei
Manon Eugénie Voisin--Leprince
Elyas Ghafoori, Christian Leinenbach, Irene Ferretto, Mahbod Golrang, Mahshid Memarian